Abstract
Understanding the operational behavior of nanoelectromechanical systems (NEMS) is the preliminary step to design functional sensors and actuators. Miniaturization is considered for further improvement in sensitivity, while the extreme surface area in NEMS devices plays a leading role in the effective performance through size dependence physical properties. Nanowire (NW) switches are one such device with significant surface effects present on the pull-in voltage. This study introduces a new approach to implement the surface effect into electromechanical behavior of NW switches based on finite element analysis. The influence of size and boundary condition on pull-in voltage is studied for silicon NWs. Results demonstrate the importance of length-to-thickness ratio as a suitable parameter to express the surface effect rather than the surface-area-to-volume ratio.
| Original language | English |
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| Title of host publication | International Conference on Numerical Analysis and Applied Mathematics, ICNAAM 2019 |
| Editors | Theodore E. Simos, Charalambos Tsitouras |
| Publisher | American Institute of Physics |
| ISBN (Electronic) | 9780735440258 |
| DOIs | |
| Publication status | Published - 25 Nov 2020 |
| Event | International Conference on Numerical Analysis and Applied Mathematics 2019, ICNAAM 2019 - Rhodes, Greece Duration: 23 Sept 2019 → 28 Sept 2019 |
Publication series
| Name | AIP Conference Proceedings |
|---|---|
| Volume | 2293 |
| ISSN (Print) | 0094-243X |
| ISSN (Electronic) | 1551-7616 |
Conference
| Conference | International Conference on Numerical Analysis and Applied Mathematics 2019, ICNAAM 2019 |
|---|---|
| Country/Territory | Greece |
| City | Rhodes |
| Period | 23/09/19 → 28/09/19 |
Bibliographical note
Publisher Copyright:© 2020 American Institute of Physics Inc.. All rights reserved.
Keywords
- Miniaturization
- Nanoelectromechanical systems
- Pull-in voltage
- Silicon nanowire
- Surface effect