Electron power absorption dynamics in capacitive radio frequency discharges driven by tailored voltage waveforms in CF4

S Brandt, B Berger, E Schüngel, I Korolov, A Derzsi, Bastien Bruneau, Erik V. Johnson, T Lafleur, Deborah O'Connell, M Koepke, Timo Gans, Jean-Paul Booth, Z Donko, J. Schulze

Physics

Research output: Contribution to journal › Article › peer-review

1 results

Finished

Metrology concepts for a new generation of plasma manufacturing with atom-scale precision
Gans, T. (Principal investigator), O'Connell, D. (Co-investigator) & Wagenaars, E. (Co-investigator)
EPSRC
1/07/13 → 21/12/18
Project: Research project (funded) › Research