Energetic electron avalanches and mode transitions in planar inductively coupled radio-frequency driven plasmas operated in oxygen

TY - JOUR

T1 - Energetic electron avalanches and mode transitions in planar inductively coupled radio-frequency driven plasmas operated in oxygen

AU - Zaka-ul-Islam, M.

AU - Niemi, K.

AU - Gans, T.

AU - O'Connell, D.

PY - 2011/7/25

Y1 - 2011/7/25

N2 - Space and phase resolved optical emission spectroscopic measurements reveal that in certain parameter regimes, inductively coupled radio-frequency driven plasmas exhibit three distinct operation modes. At low powers, the plasma operates as an alpha-mode capacitively coupled plasma driven through the dynamics of the plasma boundary sheath potential in front of the antenna. At high powers, the plasma operates in inductive mode sustained through induced electric fields due to the time varying currents and associated magnetic fields from the antenna. At intermediate powers, close to the often observed capacitive to inductive (E-H) transition regime, energetic electron avalanches are identified to play a significant role in plasma sustainment, similar to gamma-mode capacitively coupled plasmas. These energetic electrons traverse the whole plasma gap, potentially influencing plasma surface interactions as exploited in technological applications. (C) 2011 American Institute of Physics. [doi:10.1063/1.3612914]

AB - Space and phase resolved optical emission spectroscopic measurements reveal that in certain parameter regimes, inductively coupled radio-frequency driven plasmas exhibit three distinct operation modes. At low powers, the plasma operates as an alpha-mode capacitively coupled plasma driven through the dynamics of the plasma boundary sheath potential in front of the antenna. At high powers, the plasma operates in inductive mode sustained through induced electric fields due to the time varying currents and associated magnetic fields from the antenna. At intermediate powers, close to the often observed capacitive to inductive (E-H) transition regime, energetic electron avalanches are identified to play a significant role in plasma sustainment, similar to gamma-mode capacitively coupled plasmas. These energetic electrons traverse the whole plasma gap, potentially influencing plasma surface interactions as exploited in technological applications. (C) 2011 American Institute of Physics. [doi:10.1063/1.3612914]

KW - RF DISCHARGE

KW - SHEATH

KW - TIME

UR - http://www.scopus.com/inward/record.url?scp=79961082848&partnerID=8YFLogxK

U2 - 10.1063/1.3612914

DO - 10.1063/1.3612914

M3 - Article

SN - 0003-6951

VL - 99

SP - 1

EP - 3

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 4

M1 - 041501

ER -