Projects per year
A diagnostic method for the simultaneous determination of atomic oxygen densities and mean electron energies is demonstrated for an atmospheric pressure radio-frequency plasma jet. The proposed method is based on phase resolved optical emission measurements of the direct and dissociative electron-impact excitation dynamics of three distinct emission lines, namely, Ar 750.4 nm, O 777.4 nm, and O 844.6 nm. The energy dependence of these lines serves as basis for analysis by taking into account two line ratios. In this frame, the method is highly adaptable with regard to pressure and gas composition. Results are benchmarked against independent numerical simulations and two-photon absorption laser-induced fluorescence experiments.
|Number of pages||4|
|Journal||Applied Physics Letters|
|Publication status||Published - 11 Dec 2014|
Bibliographical note© 2014 The Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution 3.0 Unported License.
- 1 Finished
Metrology concepts for a new generation of plasma manufacturing with atom-scale precision
Gans, T., O'Connell, D. & Wagenaars, E.
1/07/13 → 21/12/18
Project: Research project (funded) › Research