Energy resolved actinometry for simultaneous measurement of atomic oxygen densities and local mean electron energies in radio-frequency driven plasmas

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Energy resolved actinometry for simultaneous measurement of atomic oxygen densities and local mean electron energies in radio-frequency driven plasmas
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Published copy (DOI)

10.1063/1.4903931

Author(s)

Department/unit(s)

Physics

Publication details

Journal	Applied Physics Letters
Date	Published - 11 Dec 2014
Volume	105
Number of pages	4
Original language	English

Abstract

A diagnostic method for the simultaneous determination of atomic oxygen densities and mean electron energies is demonstrated for an atmospheric pressure radio-frequency plasma jet. The proposed method is based on phase resolved optical emission measurements of the direct and dissociative electron-impact excitation dynamics of three distinct emission lines, namely, Ar 750.4 nm, O 777.4 nm, and O 844.6 nm. The energy dependence of these lines serves as basis for analysis by taking into account two line ratios. In this frame, the method is highly adaptable with regard to pressure and gas composition. Results are benchmarked against independent numerical simulations and two-photon absorption laser-induced fluorescence experiments.

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Metrology concepts for a new generation of plasma manufacturing with atom-scale precision
Project: Research project (funded) › Research

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