Enhanced control of the ionization rate in radio-frequency plasmas with structured electrodes via tailored voltage waveforms

Scott James Doyle; Trevor Lafleur; Andrew Robert Gibson; Peng Tian; M. J. Kushner; James Peter Dedrick

doi:10.1088/1361-6595/aa96e5

Enhanced control of the ionization rate in radio-frequency plasmas with structured electrodes via tailored voltage waveforms

Scott James Doyle, Trevor Lafleur, Andrew Robert Gibson, Peng Tian, M. J. Kushner, James Peter Dedrick

Physics

Research output: Contribution to journal › Article › peer-review

Original language	English
Number of pages	9
Journal	Plasma sources science & technology
Volume	26
Issue number	12
Early online date	30 Oct 2017
DOIs	https://doi.org/10.1088/1361-6595/aa96e5
Publication status	Published - 16 Nov 2017

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© IOP Publishing 2017. This is an author-produced version of the published paper. Uploaded in accordance with the publisher’s self-archiving policy. Further copying may not be permitted; contact the publisher for details

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10.1088/1361-6595/aa96e5

Doyle2017a
© IOP Publishing 2017. This is an author-produced version of the published paper. Uploaded in accordance with the publisher’s self-archiving policy. Further copying may not be permitted; contact the publisher for details
Accepted author manuscript, 670 KBLicence: CC BY-NC-ND

Enhanced control of the ionization rate in radio-frequency plasmas with structured electrodes via tailored voltage waveforms: supporting data
Dedrick, J. P. (Creator), University of York, 2017
DOI: 10.15124/3769f706-3c5d-4594-9083-73e9fb99de09
Dataset

Cite this

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title = "Enhanced control of the ionization rate in radio-frequency plasmas with structured electrodes via tailored voltage waveforms",

author = "Doyle, {Scott James} and Trevor Lafleur and Gibson, {Andrew Robert} and Peng Tian and Kushner, {M. J.} and Dedrick, {James Peter}",

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AU - Kushner, M. J.

AU - Dedrick, James Peter

N1 - © IOP Publishing 2017. This is an author-produced version of the published paper. Uploaded in accordance with the publisher’s self-archiving policy. Further copying may not be permitted; contact the publisher for details

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Enhanced control of the ionization rate in radio-frequency plasmas with structured electrodes via tailored voltage waveforms

Bibliographical note

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Enhanced control of the ionization rate in radio-frequency plasmas with structured electrodes via tailored voltage waveforms: supporting data

Cite this