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From the same journal

Enhanced control of the ionization rate in radio-frequency plasmas with structured electrodes via tailored voltage waveforms

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JournalPlasma sources science & technology
DateAccepted/In press - 30 Oct 2017
DateE-pub ahead of print - 30 Oct 2017
DatePublished (current) - 16 Nov 2017
Issue number12
Number of pages9
Early online date30/10/17
Original languageEnglish

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© IOP Publishing 2017. This is an author-produced version of the published paper. Uploaded in accordance with the publisher’s self-archiving policy. Further copying may not be permitted; contact the publisher for details

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