Experimental benchmark of kinetic simulations of capacitively coupled plasmas in molecular gases

Zoltán Donkó; Aranka Derzsi; Ihor Korolov; Peter Hartmann; Steven Brandt; Julian Schulze; Birk Burger; Mark Koepke; Bastien Bruneau; Erik V. Johnson; Trevor Lafleur; Jean-Paul Booth; Andrew Robert Gibson; Deborah O'Connell; Timo Gans

doi:10.1088/1361-6587/aa8378

Experimental benchmark of kinetic simulations of capacitively coupled plasmas in molecular gases

Zoltán Donkó, Aranka Derzsi, Ihor Korolov, Peter Hartmann, Steven Brandt, Julian Schulze, Birk Burger, Mark Koepke, Bastien Bruneau, Erik V. Johnson, Trevor Lafleur, Jean-Paul Booth, Andrew Robert Gibson, Deborah O'Connell, Timo Gans

Physics

Research output: Contribution to journal › Article › peer-review

Original language	English
Journal	Plasma Physics and Controlled Fusion
Early online date	17 Oct 2017
DOIs	https://doi.org/10.1088/1361-6587/aa8378
Publication status	Published - Jan 2018

Bibliographical note

Access to Document

10.1088/1361-6587/aa8378

Donko2017
© 2017 IOP Publishing Ltd
Accepted author manuscript, 2.4 MBLicence: CC BY

Cite this

Donkó, Z., Derzsi, A., Korolov, I., Hartmann, P., Brandt, S., Schulze, J., Burger, B., Koepke, M., Bruneau, B., Johnson, E. V., Lafleur, T., Booth, J.-P., Gibson, A. R., O'Connell, D., & Gans, T. (2018). Experimental benchmark of kinetic simulations of capacitively coupled plasmas in molecular gases. Plasma Physics and Controlled Fusion. https://doi.org/10.1088/1361-6587/aa8378

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T1 - Experimental benchmark of kinetic simulations of capacitively coupled plasmas in molecular gases

AU - Donkó, Zoltán

AU - Derzsi, Aranka

AU - Korolov, Ihor

AU - Hartmann, Peter

AU - Brandt, Steven

AU - Schulze, Julian

AU - Burger, Birk

AU - Koepke, Mark

AU - Bruneau, Bastien

AU - Johnson, Erik V.

AU - Lafleur, Trevor

AU - Booth, Jean-Paul

AU - Gibson, Andrew Robert

AU - O'Connell, Deborah

AU - Gans, Timo

PY - 2018/1

Y1 - 2018/1

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DO - 10.1088/1361-6587/aa8378

M3 - Article

SN - 0741-3335

JO - Plasma Physics and Controlled Fusion

JF - Plasma Physics and Controlled Fusion

ER -