Extreme ultra-violet laser ablation of solid targets

Gregory John Tallents; Sarah Arabella Wilson; James Lolley; Valentin Aslanyan; Andrew West; Andrew Keith Rossall; Eduardo Solis Meza; Erik Wagenaars; Carmen Menoni; Jorge Rocca

doi:10.1117/12.2528736

Extreme ultra-violet laser ablation of solid targets

Gregory John Tallents, Sarah Arabella Wilson, James Lolley, Valentin Aslanyan, Andrew West, Andrew Keith Rossall, Eduardo Solis Meza, Erik Wagenaars, Carmen Menoni, Jorge Rocca

Physics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A capillary laser with output in the extreme ultra-violet at wavelength 46.9 nm is used to ablate solid targets of parylene-N (CH), PMMA, aluminum and gold. We summarize results obtained using different focusing optics: a Fresnel zone plate, an off-axis spherical multi-layer mirror and on-axis multi-layer and gold mirrors. The Fresnel zone plate has a small aperture and focuses a small fraction of the laser energy to a small diameter (< 1 µm) with peak intensities 6 x 10^9Wcm^-2. The off-axis spherical multi-layer mirror allows for a measurement of the transmission of the laser through thin targets, but the off-axis geometry produced an aberrated focus. The on-axis multi-layer mirror allows focusing to intensities of approximately 5 x 10^10 Wcm^-2 with a cylindrically symmetric focus.

Original language	English
Title of host publication	Proc. SPIE conference series
Number of pages	7
Volume	11111
DOIs	https://doi.org/10.1117/12.2528736
Publication status	Published - 19 Sept 2019

Bibliographical note

© 2019 SPIE. This is an author-produced version of the published paper. Uploaded in accordance with the publisher’s self-archiving policy. Further copying may not be permitted; contact the publisher for details.

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Cite this

@inproceedings{0589f9f86d484008911e20edb5ccf56d,

title = "Extreme ultra-violet laser ablation of solid targets",

abstract = "A capillary laser with output in the extreme ultra-violet at wavelength 46.9 nm is used to ablate solid targets of parylene-N (CH), PMMA, aluminum and gold. We summarize results obtained using different focusing optics: a Fresnel zone plate, an off-axis spherical multi-layer mirror and on-axis multi-layer and gold mirrors. The Fresnel zone plate has a small aperture and focuses a small fraction of the laser energy to a small diameter (< 1 µm) with peak intensities 6 x 10^9Wcm^-2. The off-axis spherical multi-layer mirror allows for a measurement of the transmission of the laser through thin targets, but the off-axis geometry produced an aberrated focus. The on-axis multi-layer mirror allows focusing to intensities of approximately 5 x 10^10 Wcm^-2 with a cylindrically symmetric focus. ",

author = "Tallents, {Gregory John} and Wilson, {Sarah Arabella} and James Lolley and Valentin Aslanyan and Andrew West and Rossall, {Andrew Keith} and {Solis Meza}, Eduardo and Erik Wagenaars and Carmen Menoni and Jorge Rocca",

note = "{\textcopyright} 2019 SPIE. This is an author-produced version of the published paper. Uploaded in accordance with the publisher{\textquoteright}s self-archiving policy. Further copying may not be permitted; contact the publisher for details. ",

year = "2019",

month = sep,

day = "19",

doi = "10.1117/12.2528736",

language = "English",

volume = "11111",

booktitle = "Proc. SPIE conference series",

}

TY - GEN

T1 - Extreme ultra-violet laser ablation of solid targets

AU - Tallents, Gregory John

AU - Wilson, Sarah Arabella

AU - Lolley, James

AU - Aslanyan, Valentin

AU - West, Andrew

AU - Rossall, Andrew Keith

AU - Solis Meza, Eduardo

AU - Wagenaars, Erik

AU - Menoni, Carmen

AU - Rocca, Jorge

N1 - © 2019 SPIE. This is an author-produced version of the published paper. Uploaded in accordance with the publisher’s self-archiving policy. Further copying may not be permitted; contact the publisher for details.

PY - 2019/9/19

Y1 - 2019/9/19

N2 - A capillary laser with output in the extreme ultra-violet at wavelength 46.9 nm is used to ablate solid targets of parylene-N (CH), PMMA, aluminum and gold. We summarize results obtained using different focusing optics: a Fresnel zone plate, an off-axis spherical multi-layer mirror and on-axis multi-layer and gold mirrors. The Fresnel zone plate has a small aperture and focuses a small fraction of the laser energy to a small diameter (< 1 µm) with peak intensities 6 x 10^9Wcm^-2. The off-axis spherical multi-layer mirror allows for a measurement of the transmission of the laser through thin targets, but the off-axis geometry produced an aberrated focus. The on-axis multi-layer mirror allows focusing to intensities of approximately 5 x 10^10 Wcm^-2 with a cylindrically symmetric focus.

AB - A capillary laser with output in the extreme ultra-violet at wavelength 46.9 nm is used to ablate solid targets of parylene-N (CH), PMMA, aluminum and gold. We summarize results obtained using different focusing optics: a Fresnel zone plate, an off-axis spherical multi-layer mirror and on-axis multi-layer and gold mirrors. The Fresnel zone plate has a small aperture and focuses a small fraction of the laser energy to a small diameter (< 1 µm) with peak intensities 6 x 10^9Wcm^-2. The off-axis spherical multi-layer mirror allows for a measurement of the transmission of the laser through thin targets, but the off-axis geometry produced an aberrated focus. The on-axis multi-layer mirror allows focusing to intensities of approximately 5 x 10^10 Wcm^-2 with a cylindrically symmetric focus.

U2 - 10.1117/12.2528736

DO - 10.1117/12.2528736

M3 - Conference contribution

VL - 11111

BT - Proc. SPIE conference series

ER -