Extreme ultra-violet laser ablation of solid targets

Gregory John Tallents, Sarah Arabella Wilson, James Lolley, Valentin Aslanyan, Andrew West, Andrew Keith Rossall, Eduardo Solis Meza, Erik Wagenaars, Carmen Menoni, Jorge Rocca

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A capillary laser with output in the extreme ultra-violet at wavelength 46.9 nm is used to ablate solid targets of parylene-N (CH), PMMA, aluminum and gold. We summarize results obtained using different focusing optics: a Fresnel zone plate, an off-axis spherical multi-layer mirror and on-axis multi-layer and gold mirrors. The Fresnel zone plate has a small aperture and focuses a small fraction of the laser energy to a small diameter (< 1 µm) with peak intensities 6 x 10^9Wcm^-2. The off-axis spherical multi-layer mirror allows for a measurement of the transmission of the laser through thin targets, but the off-axis geometry produced an aberrated focus. The on-axis multi-layer mirror allows focusing to intensities of approximately 5 x 10^10 Wcm^-2 with a cylindrically symmetric focus.
Original languageEnglish
Title of host publicationProc. SPIE conference series
Number of pages7
Volume11111
DOIs
Publication statusPublished - 19 Sept 2019

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