Extreme ultraviolet laser ablation and time of flight mass spectrometry of gold, aluminum, and copper targets

Sarah Wilson; James Lolley; Eduardo Solis Meza; Gregory John Tallents; Lydia Rush; Carmen Menoni; Jorge  Rocca

Extreme ultraviolet laser ablation and time of flight mass spectrometry of gold, aluminum, and copper targets

Sarah Wilson^*, James Lolley, Eduardo Solis Meza, Gregory John Tallents, Lydia Rush, Carmen Menoni, Jorge Rocca

^*Corresponding author for this work

Research output: Contribution to conference › Paper › peer-review

Abstract

An ablation crater depth estimation model, founded on the concept of an ionizing bleaching wave, has been developed for metal targets irradiated by an extreme ultra-violet (EUV) laser. Two EUV capillary discharge lasers operating with a wavelength of 46.9 nm were focused onto targets of gold, aluminium and copper using two different experimental set-ups to maximise the laser fluence range. The experimental ablation craters were measured using an atomic force microscope and the depths are compared to the ionizing wave model. The model is dependant on the dominant ion charge of the ablated plasma, which has been measured experimentally using the low fluence set-up with a Time of Flight (TOF) mass spectrometer. The measured ablation depths and ion charges at low fluences are in agreement with the model. The ablation crater depths in the higher fluence range have confirmed the trends predicted by the model showing potential to expand its use to other materials and fluence ranges.

Original language	English
Publication status	Accepted/In press - 2024

Cite this

@conference{7e51d4e583ef4470ad3ef59809c92d75,

title = "Extreme ultraviolet laser ablation and time of flight mass spectrometry of gold, aluminum, and copper targets",

abstract = "An ablation crater depth estimation model, founded on the concept of an ionizing bleaching wave, has been developed for metal targets irradiated by an extreme ultra-violet (EUV) laser. Two EUV capillary discharge lasers operating with a wavelength of 46.9 nm were focused onto targets of gold, aluminium and copper using two different experimental set-ups to maximise the laser fluence range. The experimental ablation craters were measured using an atomic force microscope and the depths are compared to the ionizing wave model. The model is dependant on the dominant ion charge of the ablated plasma, which has been measured experimentally using the low fluence set-up with a Time of Flight (TOF) mass spectrometer. The measured ablation depths and ion charges at low fluences are in agreement with the model. The ablation crater depths in the higher fluence range have confirmed the trends predicted by the model showing potential to expand its use to other materials and fluence ranges.",

author = "Sarah Wilson and James Lolley and {Solis Meza}, Eduardo and Tallents, {Gregory John} and Lydia Rush and Carmen Menoni and Jorge Rocca",

year = "2024",

language = "English",

}

TY - CONF

T1 - Extreme ultraviolet laser ablation and time of flight mass spectrometry of gold, aluminum, and copper targets

AU - Wilson, Sarah

AU - Lolley, James

AU - Solis Meza, Eduardo

AU - Tallents, Gregory John

AU - Rush, Lydia

AU - Menoni, Carmen

AU - Rocca, Jorge

PY - 2024

Y1 - 2024

N2 - An ablation crater depth estimation model, founded on the concept of an ionizing bleaching wave, has been developed for metal targets irradiated by an extreme ultra-violet (EUV) laser. Two EUV capillary discharge lasers operating with a wavelength of 46.9 nm were focused onto targets of gold, aluminium and copper using two different experimental set-ups to maximise the laser fluence range. The experimental ablation craters were measured using an atomic force microscope and the depths are compared to the ionizing wave model. The model is dependant on the dominant ion charge of the ablated plasma, which has been measured experimentally using the low fluence set-up with a Time of Flight (TOF) mass spectrometer. The measured ablation depths and ion charges at low fluences are in agreement with the model. The ablation crater depths in the higher fluence range have confirmed the trends predicted by the model showing potential to expand its use to other materials and fluence ranges.

AB - An ablation crater depth estimation model, founded on the concept of an ionizing bleaching wave, has been developed for metal targets irradiated by an extreme ultra-violet (EUV) laser. Two EUV capillary discharge lasers operating with a wavelength of 46.9 nm were focused onto targets of gold, aluminium and copper using two different experimental set-ups to maximise the laser fluence range. The experimental ablation craters were measured using an atomic force microscope and the depths are compared to the ionizing wave model. The model is dependant on the dominant ion charge of the ablated plasma, which has been measured experimentally using the low fluence set-up with a Time of Flight (TOF) mass spectrometer. The measured ablation depths and ion charges at low fluences are in agreement with the model. The ablation crater depths in the higher fluence range have confirmed the trends predicted by the model showing potential to expand its use to other materials and fluence ranges.

M3 - Paper

ER -