By the same authors

Extreme ultra-violet laser ablation of solid targets

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Full text download(s)

Published copy (DOI)



Publication details

Title of host publicationProc. SPIE conference series
DateAccepted/In press - 9 Sep 2019
DatePublished (current) - 19 Sep 2019
Number of pages7
Original languageEnglish


A capillary laser with output in the extreme ultra-violet at wavelength 46.9 nm is used to ablate solid targets of parylene-N (CH), PMMA, aluminum and gold. We summarize results obtained using different focusing optics: a Fresnel zone plate, an off-axis spherical multi-layer mirror and on-axis multi-layer and gold mirrors. The Fresnel zone plate has a small aperture and focuses a small fraction of the laser energy to a small diameter (< 1 µm) with peak intensities 6 x 10^9Wcm^-2. The off-axis spherical multi-layer mirror allows for a measurement of the transmission of the laser through thin targets, but the off-axis geometry produced an aberrated focus. The on-axis multi-layer mirror allows focusing to intensities of approximately 5 x 10^10 Wcm^-2 with a cylindrically symmetric focus.

Bibliographical note

© 2019 SPIE. This is an author-produced version of the published paper. Uploaded in accordance with the publisher’s self-archiving policy. Further copying may not be permitted; contact the publisher for details.

Discover related content

Find related publications, people, projects, datasets and more using interactive charts.

View graph of relations