Fast parallel acquisition electron energy analyzer

Christopher G H Walker*, Andrew Walker, Ranjan Badheka, Sumio Kumashiro, Marcus Jacka, Mohamed El Gomati, Martin Prutton, Frank H. Read

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

A new types of electrostic electron energy analyzer is described that can acquire an electron energy spectrum in 'one shot'. It uses a hyperbolic field to focus electrons emitted from a solid in the energy range 50 eV to 2500 eV into a dispersive plane of about 50 mm length. An expression for the energy resolution is given and the effect of side and base plates on the behaviour of the device is discussed. The main inteneded area of application for this type of analyzer is parallel data acquisition in Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS). The potential to acquire a spectrum in just a few seconds is possible with this device.

Original languageEnglish
Pages (from-to)252-263
Number of pages12
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3777
Publication statusPublished - 1 Dec 1999

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