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Fast parallel acquisition electron energy analyzer

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Author(s)

  • Christopher G H Walker
  • Andrew Walker
  • Ranjan Badheka
  • Sumio Kumashiro
  • Marcus Jacka
  • Mohamed El Gomati
  • Martin Prutton
  • Frank H. Read

Department/unit(s)

Publication details

JournalProceedings of SPIE - The International Society for Optical Engineering
DatePublished - 1 Dec 1999
Volume3777
Number of pages12
Pages (from-to)252-263
Original languageEnglish

Abstract

A new types of electrostic electron energy analyzer is described that can acquire an electron energy spectrum in 'one shot'. It uses a hyperbolic field to focus electrons emitted from a solid in the energy range 50 eV to 2500 eV into a dispersive plane of about 50 mm length. An expression for the energy resolution is given and the effect of side and base plates on the behaviour of the device is discussed. The main inteneded area of application for this type of analyzer is parallel data acquisition in Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS). The potential to acquire a spectrum in just a few seconds is possible with this device.

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