First principles modelling of electron tunneling between defects in m-HfO2

Keith Patrick McKenna, Jochen Blumberger

Research output: Contribution to journalArticlepeer-review

Abstract

Defect assisted electron transfer processes in metal-oxide materials play a key role in a diverse range of effects of relevance to microelectronic applications. However, extracting the key parameters governing such processes experimentally is a challenging problem. Here, we present a first principles based investigation into electron transfer between oxygen vacancy defects in the high-k dielectric material HfO2. By calculating electron transfer parameters for defects separated by up to 15 Å we show that there is a crossover from coherent to incoherent electron transfer at about 5 Å. These results can provide invaluable input into numerical simulations of electron transfer, which can be used to model and understand important effects such as trap-assisted tunneling in advanced logic and memory devices.
Original languageEnglish
Pages (from-to)235-238
Number of pages4
JournalMicroelectronic Engineering
Volume147
DOIs
Publication statusPublished - 1 Nov 2015

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