Gas temperature measurements in a pulsed, low-pressure inductively coupled plasma in oxygen

David Meehan, Kari Niemi, Erik Wagenaars

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Article numberSHHB03
Number of pages7
JournalJapanese Journal of Applied Physics
Issue numberSH
Early online date5 Mar 2020
Publication statusPublished - 1 May 2020

Bibliographical note

© 2020 The Japan Society of Applied Physics

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