Gas temperature measurements in a pulsed, low-pressure inductively coupled plasma in oxygen

David Meehan; Kari Niemi; Erik Wagenaars

doi:10.35848/1347-4065/ab7313

Gas temperature measurements in a pulsed, low-pressure inductively coupled plasma in oxygen

David Meehan, Kari Niemi, Erik Wagenaars

Physics

Research output: Contribution to journal › Article › peer-review

Original language	English
Article number	SHHB03
Number of pages	7
Journal	Japanese Journal of Applied Physics
Volume	59
Issue number	SH
Early online date	5 Mar 2020
DOIs	https://doi.org/10.35848/1347-4065/ab7313
Publication status	Published - 1 May 2020

Bibliographical note

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10.35848/1347-4065/ab7313Licence: CC BY

Meehan_2020_Jpn._J._Appl._Phys._59_SHHB03
© 2020 The Japan Society of Applied Physics
Final published version, 1.08 MBLicence: CC BY

EPSRC IAA Workshops - Development of the York Plasma Institute - Industry Centre (YPIIC)
WAGENAARS, E. (Principal investigator)
EPSRC
15/07/18 → 31/03/20
Project: Other project (funded) › Restricted grant
Metrology concepts for a new generation of plasma manufacturing with atom-scale precision
GANS, T. (Principal investigator), O'CONNELL, D. (Co-investigator) & WAGENAARS, E. (Co-investigator)
EPSRC
1/07/13 → 21/12/18
Project: Research project (funded) › Research

Gas temperature measurements in a pulsed, low-pressure inductively coupled plasma in oxygen
Wagenaars, E. (Creator), Niemi, K. (Contributor) & Meehan, D. (Contributor), University of York, 2020
DOI: 10.15124/12636d1f-be1e-432f-a75b-b234c3113ea9
Dataset

Cite this

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title = "Gas temperature measurements in a pulsed, low-pressure inductively coupled plasma in oxygen",

author = "David Meehan and Kari Niemi and Erik Wagenaars",

note = "{\textcopyright} 2020 The Japan Society of Applied Physics",

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T1 - Gas temperature measurements in a pulsed, low-pressure inductively coupled plasma in oxygen

AU - Meehan, David

AU - Niemi, Kari

AU - Wagenaars, Erik

PY - 2020/5/1

Y1 - 2020/5/1

U2 - 10.35848/1347-4065/ab7313

DO - 10.35848/1347-4065/ab7313

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JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

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M1 - SHHB03

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Gas temperature measurements in a pulsed, low-pressure inductively coupled plasma in oxygen

Bibliographical note

Access to Document

Projects

EPSRC IAA Workshops - Development of the York Plasma Institute - Industry Centre (YPIIC)

Metrology concepts for a new generation of plasma manufacturing with atom-scale precision

Datasets

Gas temperature measurements in a pulsed, low-pressure inductively coupled plasma in oxygen

Cite this