Gas temperature measurements in a pulsed, low-pressure inductively coupled plasma in oxygen

Research output: Contribution to journal › Article › peer-review

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EPSRC IAA Workshops - Development of the York Plasma Institute - Industry Centre (YPIIC)
Wagenaars, E. (Principal investigator)
EPSRC
15/07/18 → 31/03/20
Project: Other project (funded) › Restricted grant
Metrology concepts for a new generation of plasma manufacturing with atom-scale precision
Gans, T. (Principal investigator), O'Connell, D. (Co-investigator) & Wagenaars, E. (Co-investigator)
EPSRC
1/07/13 → 21/12/18
Project: Research project (funded) › Research

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