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Gas temperature measurements in a pulsed, low-pressure inductively coupled plasma in oxygen

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JournalJapanese Journal of Applied Physics
DateAccepted/In press - 5 Feb 2020
DateE-pub ahead of print - 5 Mar 2020
DatePublished (current) - 1 May 2020
Issue numberSH
Volume59
Number of pages7
Early online date5/03/20
Original languageEnglish

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© 2020 The Japan Society of Applied Physics

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