Generation of atomic oxygen in the effluent of an atmospheric pressure plasma jet

S. Reuter, K. Niemi, V. Schulz-von der Gathen, H. F. Doebele

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The planar 13.56MHz RF-excited low temperature atmospheric pressure plasma jet (APPJ) investigated in this study is operated with helium feed gas and a small molecular oxygen admixture. The effluent leaving the discharge through the jet's nozzle contains very few charged particles and a high reactive oxygen species' density. As its main reactive radical, essential for numerous applications, the ground state atomic oxygen density in the APPJ's effluent is measured spatially resolved with two-photon absorption laser induced fluorescence spectroscopy. The atomic oxygen density at the nozzle reaches a value of similar to 10(16) cm(-3). Even at several centimetres distance still 1% of this initial atomic oxygen density can be detected. Optical emission spectroscopy (OES) reveals the presence of short living excited oxygen atoms up to 10 cm distance from the jet's nozzle. The measured high ground state atomic oxygen density and the unaccounted for presence of excited atomic oxygen require further investigations on a possible energy transfer from the APPJ's discharge region into the effluent: energetic vacuum ultraviolet radiation, measured by OES down to 110 nm, reaches far into the effluent where it is presumed to be responsible for the generation of atomic oxygen.(4)

Original languageEnglish
Article number015006
Pages (from-to)-
Number of pages9
JournalPlasma sources science & technology
Issue number1
Publication statusPublished - Feb 2009

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