High resolution retarding field analyser

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Publication details

Title of host publicationIVMC 2000: PROCEEDINGS OF THE 14TH INTERNATIONAL VACUUM MICROELECTRONICES CONFERENCE
DatePublished - 2001
Pages11-12
Number of pages2
PublisherIEEE
Place of PublicationNEW YORK
EditorsCE Hunt, AG Chakhovskoi, NN Chubun, M Hajra
Original languageEnglish
ISBN (Print)0-7803-7197-6

Abstract

A novel electrostatic charged particle energy analyser based on the high resolution retarding field analyser is presented. This device has been designed to allow for complete miniaturisation using existing silicon micromachining techniques. Experimental data collated using large scale versions of this device indicate that the resolution is dependent on the length to diameter ratio of the analyser body with an optimum resolution of 1% being obtained.

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