High resolution retarding field analyser

SD Johnson; Mohamed M El Gomati; J Mahadevan; L Enloe

High resolution retarding field analyser

SD Johnson^*, Mohamed M El Gomati, J Mahadevan, L Enloe

^*Corresponding author for this work

Electronic Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A novel electrostatic charged particle energy analyser based on the high resolution retarding field analyser is presented. This device has been designed to allow for complete miniaturisation using existing silicon micromachining techniques. Experimental data collated using large scale versions of this device indicate that the resolution is dependent on the length to diameter ratio of the analyser body with an optimum resolution of 1% being obtained.

Original language	English
Title of host publication	IVMC 2000: PROCEEDINGS OF THE 14TH INTERNATIONAL VACUUM MICROELECTRONICES CONFERENCE
Editors	CE Hunt, AG Chakhovskoi, NN Chubun, M Hajra
Place of Publication	NEW YORK
Publisher	IEEE
Pages	11-12
Number of pages	2
ISBN (Print)	0-7803-7197-6
Publication status	Published - 2001
Event	14th International Vacuum Microelectronics Conference - DAVIS, Canada Duration: 12 Aug 2001 → 16 Aug 2001

Conference

Conference	14th International Vacuum Microelectronics Conference
Country/Territory	Canada
City	DAVIS
Period	12/08/01 → 16/08/01

Cite this

@inproceedings{3c7d9b4b7fb448ae8160d031f46fb439,

title = "High resolution retarding field analyser",

abstract = "A novel electrostatic charged particle energy analyser based on the high resolution retarding field analyser is presented. This device has been designed to allow for complete miniaturisation using existing silicon micromachining techniques. Experimental data collated using large scale versions of this device indicate that the resolution is dependent on the length to diameter ratio of the analyser body with an optimum resolution of 1% being obtained.",

author = "SD Johnson and {El Gomati}, {Mohamed M} and J Mahadevan and L Enloe",

year = "2001",

language = "English",

isbn = "0-7803-7197-6",

pages = "11--12",

editor = "CE Hunt and AG Chakhovskoi and NN Chubun and M Hajra",

booktitle = "IVMC 2000: PROCEEDINGS OF THE 14TH INTERNATIONAL VACUUM MICROELECTRONICES CONFERENCE",

publisher = "IEEE",

address = "United States",

note = "14th International Vacuum Microelectronics Conference ; Conference date: 12-08-2001 Through 16-08-2001",

}

TY - GEN

T1 - High resolution retarding field analyser

AU - Johnson, SD

AU - El Gomati, Mohamed M

AU - Mahadevan, J

AU - Enloe, L

PY - 2001

Y1 - 2001

N2 - A novel electrostatic charged particle energy analyser based on the high resolution retarding field analyser is presented. This device has been designed to allow for complete miniaturisation using existing silicon micromachining techniques. Experimental data collated using large scale versions of this device indicate that the resolution is dependent on the length to diameter ratio of the analyser body with an optimum resolution of 1% being obtained.

AB - A novel electrostatic charged particle energy analyser based on the high resolution retarding field analyser is presented. This device has been designed to allow for complete miniaturisation using existing silicon micromachining techniques. Experimental data collated using large scale versions of this device indicate that the resolution is dependent on the length to diameter ratio of the analyser body with an optimum resolution of 1% being obtained.

M3 - Conference contribution

SN - 0-7803-7197-6

SP - 11

EP - 12

BT - IVMC 2000: PROCEEDINGS OF THE 14TH INTERNATIONAL VACUUM MICROELECTRONICES CONFERENCE

A2 - Hunt, CE

A2 - Chakhovskoi, AG

A2 - Chubun, NN

A2 - Hajra, M

PB - IEEE

CY - NEW YORK

T2 - 14th International Vacuum Microelectronics Conference

Y2 - 12 August 2001 through 16 August 2001

ER -