By the same authors

From the same journal

High-Q photonic crystal cavities realised using deep ultraviolet lithography

Research output: Contribution to journalArticlepeer-review

Published copy (DOI)



Publication details

JournalElectronics Letters
DatePublished - 1 Jan 2015
Issue number16
Number of pages3
Pages (from-to)1277-1279
Original languageEnglish


Deep-ultraviolet lithography is essential for the mass production of silicon devices. To date, restrictions in the process have prevented the realisation of high-Q-factor optical resonators. This reported work demonstrates photonic crystal cavities with Q-factor values of ∼200 000 using an optimised design.

Discover related content

Find related publications, people, projects, datasets and more using interactive charts.

View graph of relations