Improved fluid simulations of radio-frequency plasmas using energy dependent ion mobilities

Arthur Greb; Kari Niemi; Deborah O'Connell; Gerard J. Ennis; Niall MacGearailt; Timo Gans

doi:10.1063/1.4804280

Improved fluid simulations of radio-frequency plasmas using energy dependent ion mobilities

Arthur Greb, Kari Niemi, Deborah O'Connell, Gerard J. Ennis, Niall MacGearailt, Timo Gans

Physics

Research output: Contribution to journal › Article › peer-review

Abstract

Symmetric and asymmetric capacitively coupled radio-frequency plasmas in oxygen at 40 Pa, 300V voltage amplitude and a discharge gap of 40mm are investigated by means of onedimensional numerical semi-kinetic fluid modeling on the basis of a simplified reaction scheme including the dominant positive and negative ions, background gas, and electrons. An improved treatment, by accounting for the dependence of ion mobilities on E/N, is compared to the standard approach, based on using zero-field mobility values only. The charged particle dynamics as a result of direct electron impact ionization of oxygen, secondary electron release from the electrodes, the spatial distribution of all involved particles as well as impact of geometry and model modification on ion energies is analyzed and compared to independent simulations and experiments.

Original language	English
Article number	053502
Pages (from-to)	1-9
Number of pages	9
Journal	Physics of Plasmas
Volume	20
Issue number	5
DOIs	https://doi.org/10.1063/1.4804280
Publication status	Published - May 2013

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10.1063/1.4804280

http://scitation.aip.org/content/aip/journal/pop/20/5/10.1063/1.4804280

Cite this

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title = "Improved fluid simulations of radio-frequency plasmas using energy dependent ion mobilities",

abstract = "Symmetric and asymmetric capacitively coupled radio-frequency plasmas in oxygen at 40 Pa, 300V voltage amplitude and a discharge gap of 40mm are investigated by means of onedimensional numerical semi-kinetic fluid modeling on the basis of a simplified reaction scheme including the dominant positive and negative ions, background gas, and electrons. An improved treatment, by accounting for the dependence of ion mobilities on E/N, is compared to the standard approach, based on using zero-field mobility values only. The charged particle dynamics as a result of direct electron impact ionization of oxygen, secondary electron release from the electrodes, the spatial distribution of all involved particles as well as impact of geometry and model modification on ion energies is analyzed and compared to independent simulations and experiments.",

author = "Arthur Greb and Kari Niemi and Deborah O'Connell and Ennis, {Gerard J.} and Niall MacGearailt and Timo Gans",

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AU - Greb, Arthur

AU - Niemi, Kari

AU - O'Connell, Deborah

AU - Ennis, Gerard J.

AU - MacGearailt, Niall

AU - Gans, Timo

PY - 2013/5

Y1 - 2013/5

N2 - Symmetric and asymmetric capacitively coupled radio-frequency plasmas in oxygen at 40 Pa, 300V voltage amplitude and a discharge gap of 40mm are investigated by means of onedimensional numerical semi-kinetic fluid modeling on the basis of a simplified reaction scheme including the dominant positive and negative ions, background gas, and electrons. An improved treatment, by accounting for the dependence of ion mobilities on E/N, is compared to the standard approach, based on using zero-field mobility values only. The charged particle dynamics as a result of direct electron impact ionization of oxygen, secondary electron release from the electrodes, the spatial distribution of all involved particles as well as impact of geometry and model modification on ion energies is analyzed and compared to independent simulations and experiments.

AB - Symmetric and asymmetric capacitively coupled radio-frequency plasmas in oxygen at 40 Pa, 300V voltage amplitude and a discharge gap of 40mm are investigated by means of onedimensional numerical semi-kinetic fluid modeling on the basis of a simplified reaction scheme including the dominant positive and negative ions, background gas, and electrons. An improved treatment, by accounting for the dependence of ion mobilities on E/N, is compared to the standard approach, based on using zero-field mobility values only. The charged particle dynamics as a result of direct electron impact ionization of oxygen, secondary electron release from the electrodes, the spatial distribution of all involved particles as well as impact of geometry and model modification on ion energies is analyzed and compared to independent simulations and experiments.

U2 - 10.1063/1.4804280

DO - 10.1063/1.4804280

M3 - Article

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JF - Physics of Plasmas

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M1 - 053502

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