Investigation of the radially resolved oxygen dissociation degree and local mean electron energy in oxygen plasmas in contact with different surface materials

Takayoshi Tsutsumi; Arthur Greb; Andrew Robert Gibson; Masaru Hori; Deborah O'Connell; Timo Gans

doi:10.1063/1.4979855

Investigation of the radially resolved oxygen dissociation degree and local mean electron energy in oxygen plasmas in contact with different surface materials

Takayoshi Tsutsumi, Arthur Greb, Andrew Robert Gibson, Masaru Hori, Deborah O'Connell, Timo Gans

Physics

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	143301
Journal	Journal of Applied Physics
Volume	121
Issue number	14
DOIs	https://doi.org/10.1063/1.4979855
Publication status	Published - 10 Apr 2017

Bibliographical note

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10.1063/1.4979855

Tsutsumi2017
© 2017 The Author(s).
Final published version, 1.3 MBLicence: CC BY

Cite this

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title = "Investigation of the radially resolved oxygen dissociation degree and local mean electron energy in oxygen plasmas in contact with different surface materials",

author = "Takayoshi Tsutsumi and Arthur Greb and Gibson, {Andrew Robert} and Masaru Hori and Deborah O'Connell and Timo Gans",

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AU - Tsutsumi, Takayoshi

AU - Greb, Arthur

AU - Gibson, Andrew Robert

AU - Hori, Masaru

AU - O'Connell, Deborah

AU - Gans, Timo

PY - 2017/4/10

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U2 - 10.1063/1.4979855

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M3 - Article

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VL - 121

SP - 143301

JO - Journal of Applied Physics

JF - Journal of Applied Physics

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