Investigation of the radially resolved oxygen dissociation degree and local mean electron energy in oxygen plasmas in contact with different surface materials

Takayoshi Tsutsumi, Arthur Greb, Andrew Robert Gibson, Masaru Hori, Deborah O'Connell, Timo Gans

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)143301
JournalJournal of Applied Physics
Issue number14
Publication statusPublished - 10 Apr 2017

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© 2017 The Author(s).

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