Abstract
Excitation of surfaces with ions or neutrals gives rise to elastic or inelastic scattering processes or to nuclear reactions. As a result of this processes, a variety of secondary particles, such as electrons, photons, positive or negative ions, or neutrals may be emitted. Numerous combinations of the excitation and emitted particles are used for analytical purposes. From these combinations, some of the most popular spectroscopies are ion Auger electron spectroscopy (IAES) (which is based on electron detection), secondary ion mass spectrometry or secondary neutral mass spectrometry (SIMS or SNMS), Rutherford backscattering spectroscopy (RBS), low energy ion scattering (LEIS), elastic recoil detection analysis (ERDA), or nuclear reaction analysis (NRA) (which are all based on ion detection), and glow discharge optical emission spectrometry (GD-OES) or ion beam spectrochemical analysis (IBSA) (which are both based on photon detection) for photon detection. Individual techniques are presented in alphanumerical order.
| Original language | English |
|---|---|
| Title of host publication | Handbook of Spectroscopy |
| Subtitle of host publication | Second, Enlarged Edition |
| Editors | Günter Gauglitz, David S. Moore |
| Publisher | Wiley-Blackwell |
| Pages | 741-778 |
| Number of pages | 38 |
| Edition | 2nd |
| ISBN (Electronic) | 9783527654703 |
| ISBN (Print) | 9783527321506 |
| DOIs | |
| Publication status | Published - 2 Apr 2014 |
Keywords
- Inelastic and elastic scattering processes
- Excitation
- Materials analysis
- Nuclear reactions
- Metastable de-excitation spectroscopy