Ion/Neutral Probe Techniques

Anna Macková, Andrew Pratt

Research output: Chapter in Book/Report/Conference proceedingChapter


Excitation of surfaces with ions or neutrals gives rise to elastic or inelastic scattering processes or to nuclear reactions. As a result of this processes, a variety of secondary particles, such as electrons, photons, positive or negative ions, or neutrals may be emitted. Numerous combinations of the excitation and emitted particles are used for analytical purposes. From these combinations, some of the most popular spectroscopies are ion Auger electron spectroscopy (IAES) (which is based on electron detection), secondary ion mass spectrometry or secondary neutral mass spectrometry (SIMS or SNMS), Rutherford backscattering spectroscopy (RBS), low energy ion scattering (LEIS), elastic recoil detection analysis (ERDA), or nuclear reaction analysis (NRA) (which are all based on ion detection), and glow discharge optical emission spectrometry (GD-OES) or ion beam spectrochemical analysis (IBSA) (which are both based on photon detection) for photon detection. Individual techniques are presented in alphanumerical order.
Original languageEnglish
Title of host publicationHandbook of Spectroscopy
Subtitle of host publicationSecond, Enlarged Edition
EditorsGünter Gauglitz, David S. Moore
Number of pages38
ISBN (Electronic)9783527654703
ISBN (Print)9783527321506
Publication statusPublished - 2 Apr 2014


  • Inelastic and elastic scattering processes
  • Excitation
  • Materials analysis
  • Nuclear reactions
  • Metastable de-excitation spectroscopy

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