Abstract
Resonant micro-electrometers have been the research interest to many groups around the world. Conventionally, the resonant electrometers rely on a frequency-shift based readout. In this chapter, a new type of resonant micro-electrometer based on mode-localization effect is introduced and discussed. This new electrometer implementation is one subset of a broader family of sensors termed as “mode-localized sensors”. The readout metric of this category of sensors is essentially based on amplitude modulation, which is a key identifier of this approach. In addition to the sensing paradigm shift, the mode-localized sensors have a distinguishable topology to the convention based on a single resonator: that is, typically more than one resonators are intentionally coupled to each other through a coupling element, to allow spatial energy extension. Due the advantages that accompany the unique configurations, such as higher sensitivity and common mode rejection capabilities, the new sensing scheme has quickly attracted researchers’ attention. And naturally it has been adapted for electrometer applications. Currently, the resolution that can be achieved by an electrometer utilizing this approach can be less than 10 e/Hz1/2. Future directions to further enhance the sensor performance are also discussed.
| Original language | English |
|---|---|
| Title of host publication | Micro and Nano Machined Electrometers |
| Publisher | Springer |
| Pages | 43-81 |
| Number of pages | 39 |
| ISBN (Electronic) | 9789811332470 |
| ISBN (Print) | 9789811332463 |
| DOIs | |
| Publication status | Published - 1 Jan 2020 |
Bibliographical note
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