Micromachined accelerometers with sub-µg/ Hz noise floor: A review

Chen Wang; Fang Chen; Yuan Wang; Sina Sadeghpour; Chenxi Wang; Mathieu Baijot; Rui Esteves; Chun Zhao; Jian Bai; Huafeng Liu; Michael Kraft

doi:10.3390/s20144054

Micromachined accelerometers with sub-µg/ Hz noise floor: A review

Chen Wang, Fang Chen, Yuan Wang, Sina Sadeghpour, Chenxi Wang, Mathieu Baijot, Rui Esteves, Chun Zhao, Jian Bai^*, Huafeng Liu, Michael Kraft

^*Corresponding author for this work

Electronic Engineering

Research output: Contribution to journal › Review article › peer-review

Abstract

This paper reviews√ the research and development of micromachined accelerometers with a noise floor lower than 1 µg/ Hz. Firstly, the basic working principle of micromachined accelerometers is introduced. Then, different methods of reducing the noise floor of micromachined accelerometers√ are analyzed. Different types of micromachined accelerometers with a noise floor below 1 µg/ Hz are discussed. Such sensors can mainly be categorized into: (i) micromachined accelerometers with a low spring constant; (ii) with a large proof mass; (iii) with a high quality factor; (iv) with a low noise interface circuit; (v) with sensing schemes leading to a high scale factor. Finally, the characteristics of various micromachined accelerometers and their trends are discussed and investigated.

Original language	English
Article number	4054
Journal	Sensors (Switzerland)
Volume	20
Issue number	14
DOIs	https://doi.org/10.3390/s20144054
Publication status	Published - 21 Jul 2020

Bibliographical note

Funding Information:
Funding: This research was funded by the Science Challenge Project, grant number TZ2016006-0502-02, Natural Science Foundation of Hubei Province under Grant No. 2019CFB108.

Publisher Copyright:
© 2020 by the authors. Licensee MDPI, Basel, Switzerland.

Keywords

Accelerometer review
Accelerometer structure
Inertial sensors
Low-g accelerometer
Micro-Electro–Mechanical System (MEMS)
Micromachined/micro accelerometers
Seismometer

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10.3390/s20144054

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@article{34e5f8d0c047405e97046c27c2117377,

title = "Micromachined accelerometers with sub-µg/ Hz noise floor: A review",

abstract = "This paper reviews√ the research and development of micromachined accelerometers with a noise floor lower than 1 µg/ Hz. Firstly, the basic working principle of micromachined accelerometers is introduced. Then, different methods of reducing the noise floor of micromachined accelerometers√ are analyzed. Different types of micromachined accelerometers with a noise floor below 1 µg/ Hz are discussed. Such sensors can mainly be categorized into: (i) micromachined accelerometers with a low spring constant; (ii) with a large proof mass; (iii) with a high quality factor; (iv) with a low noise interface circuit; (v) with sensing schemes leading to a high scale factor. Finally, the characteristics of various micromachined accelerometers and their trends are discussed and investigated.",

keywords = "Accelerometer review, Accelerometer structure, Inertial sensors, Low-g accelerometer, Micro-Electro–Mechanical System (MEMS), Micromachined/micro accelerometers, Seismometer",

author = "Chen Wang and Fang Chen and Yuan Wang and Sina Sadeghpour and Chenxi Wang and Mathieu Baijot and Rui Esteves and Chun Zhao and Jian Bai and Huafeng Liu and Michael Kraft",

note = "Funding Information: Funding: This research was funded by the Science Challenge Project, grant number TZ2016006-0502-02, Natural Science Foundation of Hubei Province under Grant No. 2019CFB108. Publisher Copyright: {\textcopyright} 2020 by the authors. Licensee MDPI, Basel, Switzerland.",

year = "2020",

month = jul,

day = "21",

doi = "10.3390/s20144054",

language = "English",

volume = "20",

journal = "Sensors (Switzerland)",

issn = "1424-8220",

publisher = "Multidisciplinary Digital Publishing Institute (MDPI)",

number = "14",

}

TY - JOUR

T1 - Micromachined accelerometers with sub-µg/ Hz noise floor

T2 - A review

AU - Wang, Chen

AU - Chen, Fang

AU - Wang, Yuan

AU - Sadeghpour, Sina

AU - Wang, Chenxi

AU - Baijot, Mathieu

AU - Esteves, Rui

AU - Zhao, Chun

AU - Bai, Jian

AU - Liu, Huafeng

AU - Kraft, Michael

N1 - Funding Information: Funding: This research was funded by the Science Challenge Project, grant number TZ2016006-0502-02, Natural Science Foundation of Hubei Province under Grant No. 2019CFB108. Publisher Copyright: © 2020 by the authors. Licensee MDPI, Basel, Switzerland.

PY - 2020/7/21

Y1 - 2020/7/21

N2 - This paper reviews√ the research and development of micromachined accelerometers with a noise floor lower than 1 µg/ Hz. Firstly, the basic working principle of micromachined accelerometers is introduced. Then, different methods of reducing the noise floor of micromachined accelerometers√ are analyzed. Different types of micromachined accelerometers with a noise floor below 1 µg/ Hz are discussed. Such sensors can mainly be categorized into: (i) micromachined accelerometers with a low spring constant; (ii) with a large proof mass; (iii) with a high quality factor; (iv) with a low noise interface circuit; (v) with sensing schemes leading to a high scale factor. Finally, the characteristics of various micromachined accelerometers and their trends are discussed and investigated.

AB - This paper reviews√ the research and development of micromachined accelerometers with a noise floor lower than 1 µg/ Hz. Firstly, the basic working principle of micromachined accelerometers is introduced. Then, different methods of reducing the noise floor of micromachined accelerometers√ are analyzed. Different types of micromachined accelerometers with a noise floor below 1 µg/ Hz are discussed. Such sensors can mainly be categorized into: (i) micromachined accelerometers with a low spring constant; (ii) with a large proof mass; (iii) with a high quality factor; (iv) with a low noise interface circuit; (v) with sensing schemes leading to a high scale factor. Finally, the characteristics of various micromachined accelerometers and their trends are discussed and investigated.

KW - Accelerometer review

KW - Accelerometer structure

KW - Inertial sensors

KW - Low-g accelerometer

KW - Micro-Electro–Mechanical System (MEMS)

KW - Micromachined/micro accelerometers

KW - Seismometer

UR - http://www.scopus.com/inward/record.url?scp=85088274407&partnerID=8YFLogxK

U2 - 10.3390/s20144054

DO - 10.3390/s20144054

M3 - Review article

C2 - 32708191

AN - SCOPUS:85088274407

SN - 1424-8220

VL - 20

JO - Sensors (Switzerland)

JF - Sensors (Switzerland)

IS - 14

M1 - 4054

ER -

Micromachined accelerometers with sub-µg/ Hz noise floor: A review

Abstract

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Keywords

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