Abstract
A microwave-induced plasma (MIP) reactor has been constructed from a domestic microwave oven (DMO) and applied to the bulk synthesis of solid state compounds. Low pressure MIP can be initiated and maintained using a range of gases including Ar, N-2, NH3, O-2, Cl-2, and H2S. In order to obtain reproducible synthesis conditions the apparatus is designed to allow control of gas flow rate, gas composition, and pressure. The use of the reactor is demonstrated by the synthesis of three binary metal nitrides formed in a NH3 MIP. The reactions are rapid and the products show good crystallinity and phase purity as judged by powder x-ray diffraction. (C) 2004 American Institute of Physics.
Original language | English |
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Pages (from-to) | 5277-5279 |
Number of pages | 3 |
Journal | Review of Scientific Instruments |
Volume | 75 |
Issue number | 12 |
DOIs | |
Publication status | Published - Dec 2004 |
Keywords
- YBA2CU3O7-DELTA CERAMICS
- ENHANCED FLUORINATION
- NITRIDATION