Modelling extreme ultraviolet ablation interactions

James Lolley; Sarah Arabella Wilson; Gregory John Tallents

doi:10.1117/12.2523137

Modelling extreme ultraviolet ablation interactions

James Lolley, Sarah Arabella Wilson, Gregory John Tallents

Physics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Compact extreme ultraviolet (EUV) laser sources can be used for laboratory-scale ablation experiments at intensities of 1 x 10^11 Wcm^-2 and higher. The depths of ablation achieved using focused laser output at 46.9 nm to irradiate solid targets of aluminium, gold and copper have been modeled. Two simple models are considered; an adaption of an ultra-short pulse model, and an ablation velocity model. We show that the attenuation length of the material plays an important role in the physics of the ablation. A more detailed one-dimensional model including absorption by inverse bremsstrahlung absorption and photo-ionization, corrected to include electron degeneracy effects, is used to evaluate the opacity of the ablation plasma and subsequent ablation depths.

Original language	English
Title of host publication	Proceedings Volume 11035, Optics Damage and Materials Processing by EUV/X-ray Radiation VII; 110350R (2019)
Publisher	SPIE
Pages	R1- R8
Number of pages	8
Volume	11035
DOIs	https://doi.org/10.1117/12.2523137
Publication status	Published - 24 Apr 2019

Bibliographical note

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Access to Document

10.1117/12.2523137

SPIE110350R
Uploaded in accordance with the publisher’s self-archiving policy. Further copying may not be permitted; contact the publisher for details
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Cite this

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title = "Modelling extreme ultraviolet ablation interactions",

abstract = "Compact extreme ultraviolet (EUV) laser sources can be used for laboratory-scale ablation experiments at intensities of 1 x 10^11 Wcm^-2 and higher. The depths of ablation achieved using focused laser output at 46.9 nm to irradiate solid targets of aluminium, gold and copper have been modeled. Two simple models are considered; an adaption of an ultra-short pulse model, and an ablation velocity model. We show that the attenuation length of the material plays an important role in the physics of the ablation. A more detailed one-dimensional model including absorption by inverse bremsstrahlung absorption and photo-ionization, corrected to include electron degeneracy effects, is used to evaluate the opacity of the ablation plasma and subsequent ablation depths.",

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AB - Compact extreme ultraviolet (EUV) laser sources can be used for laboratory-scale ablation experiments at intensities of 1 x 10^11 Wcm^-2 and higher. The depths of ablation achieved using focused laser output at 46.9 nm to irradiate solid targets of aluminium, gold and copper have been modeled. Two simple models are considered; an adaption of an ultra-short pulse model, and an ablation velocity model. We show that the attenuation length of the material plays an important role in the physics of the ablation. A more detailed one-dimensional model including absorption by inverse bremsstrahlung absorption and photo-ionization, corrected to include electron degeneracy effects, is used to evaluate the opacity of the ablation plasma and subsequent ablation depths.

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