Abstract
Molecular dynamics (MD) simulations are employed to investigate the influence of native oxide layer on the mechanical properties of Si nanowires (NWs) through analyzing surface stress and surface energy effect. This work studies the tensile response of Si NWs along <100> and <110> crystal orientations. MD results are compared with the traditional core-shell model on the estimation of the modulus of elasticity of Si NWs with a native oxide layer. Density functional theory (DFT) methods are used to verify MD results on the surface energy calculations. Surface stress and surface elastic constants are studied for native oxide surface using MD simulations and compared with unreconstructed surfaces. In this work, the role of native oxide is addressed to understand the difference between experimental and computational findings on the modulus of elasticity of Si NWs.
Original language | English |
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Title of host publication | NANO 2021 - 21st IEEE International Conference on Nanotechnology, Proceedings |
Publisher | IEEE Computer Society |
Pages | 370-373 |
Number of pages | 4 |
ISBN (Electronic) | 9781665441568 |
DOIs | |
Publication status | Published - 28 Jul 2021 |
Event | 21st IEEE International Conference on Nanotechnology, NANO 2021 - Virtual, Montreal, Canada Duration: 28 Jul 2021 → 30 Jul 2021 |
Publication series
Name | Proceedings of the IEEE Conference on Nanotechnology |
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Volume | 2021-July |
ISSN (Print) | 1944-9399 |
ISSN (Electronic) | 1944-9380 |
Conference
Conference | 21st IEEE International Conference on Nanotechnology, NANO 2021 |
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Country/Territory | Canada |
City | Virtual, Montreal |
Period | 28/07/21 → 30/07/21 |
Bibliographical note
Publisher Copyright:© 2021 IEEE.