Molecular Dynamics Study of Orientation-dependent Tensile Properties of Si Nanowires with Native Oxide: Surface Stress and Surface Energy Effects

Sina Zare Pakzad, Mohammad Nasr Esfahani, B. Erdem Alaca*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Molecular dynamics (MD) simulations are employed to investigate the influence of native oxide layer on the mechanical properties of Si nanowires (NWs) through analyzing surface stress and surface energy effect. This work studies the tensile response of Si NWs along <100> and <110> crystal orientations. MD results are compared with the traditional core-shell model on the estimation of the modulus of elasticity of Si NWs with a native oxide layer. Density functional theory (DFT) methods are used to verify MD results on the surface energy calculations. Surface stress and surface elastic constants are studied for native oxide surface using MD simulations and compared with unreconstructed surfaces. In this work, the role of native oxide is addressed to understand the difference between experimental and computational findings on the modulus of elasticity of Si NWs.

Original languageEnglish
Title of host publicationNANO 2021 - 21st IEEE International Conference on Nanotechnology, Proceedings
PublisherIEEE Computer Society
Pages370-373
Number of pages4
ISBN (Electronic)9781665441568
DOIs
Publication statusPublished - 28 Jul 2021
Event21st IEEE International Conference on Nanotechnology, NANO 2021 - Virtual, Montreal, Canada
Duration: 28 Jul 202130 Jul 2021

Publication series

NameProceedings of the IEEE Conference on Nanotechnology
Volume2021-July
ISSN (Print)1944-9399
ISSN (Electronic)1944-9380

Conference

Conference21st IEEE International Conference on Nanotechnology, NANO 2021
Country/TerritoryCanada
CityVirtual, Montreal
Period28/07/2130/07/21

Bibliographical note

Publisher Copyright:
© 2021 IEEE.

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