Monte Carlo modeling of the low-loss electron signal in scanning electron microscopy and comparison with the BSE signal

C. Bonet; A. Pratt; M. El-Gomati; J. A D Matthew; S. P. Tear

doi:10.1017/S1431927608087977

Monte Carlo modeling of the low-loss electron signal in scanning electron microscopy and comparison with the BSE signal

C. Bonet^*, A. Pratt, M. El-Gomati, J. A D Matthew, S. P. Tear

^*Corresponding author for this work

Physics

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	946-947
Number of pages	2
Journal	Microscopy and Microanalysis
Volume	14
Issue number	SUPPL. 2
DOIs	https://doi.org/10.1017/S1431927608087977
Publication status	Published - 1 Aug 2008

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title = "Monte Carlo modeling of the low-loss electron signal in scanning electron microscopy and comparison with the BSE signal",

author = "C. Bonet and A. Pratt and M. El-Gomati and Matthew, {J. A D} and Tear, {S. P.}",

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AU - Bonet, C.

AU - Pratt, A.

AU - El-Gomati, M.

AU - Matthew, J. A D

AU - Tear, S. P.

PY - 2008/8/1

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JO - Microscopy and Microanalysis

JF - Microscopy and Microanalysis

IS - SUPPL. 2

ER -

Monte Carlo modeling of the low-loss electron signal in scanning electron microscopy and comparison with the BSE signal

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