Original language | English |
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Title of host publication | Microscopy Society of America |
Publisher | Microscopy and Microanalysis |
Volume | 14(Suppl.2) |
Publication status | Published - 2008 |
Nanofabrication by 3D e-beam cutting
G Thirunavukkarasu, Z Saghi, Y Peng and G Möbus
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution