Nanofabrication by 3D e-beam cutting

G Thirunavukkarasu, Z Saghi, Y Peng and G Möbus

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationMicroscopy Society of America
PublisherMicroscopy and Microanalysis
Volume14(Suppl.2)
Publication statusPublished - 2008

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