Abstract
Neutral gas depletion mechanisms are investigated in a dense low-temperature argon plasma-an inductively coupled magnetic neutral loop (NL) discharge. Gas temperatures are deduced from the Doppler profile of the 772.38 nm line absorbed by argon metastable atoms. Electron density and temperature measurements reveal that at pressures below 0.1 Pa, relatively high degrees of ionization (exceeding 1%) result in electron pressures, p(e) = kT(e)n(e), exceeding the neutral gas pressure. In this regime, neutral dynamics has to be taken into account and depletion through comparatively high ionization rates becomes important. This additional depletion mechanism can be spatially separated due to non-uniform electron temperature and density profiles (non-uniform ionization rate), while the gas temperature is rather uniform within the discharge region. Spatial profiles of the depletion of metastable argon atoms in the NL region are observed by laser induced fluorescence spectroscopy. In this region, the depletion of ground state argon atoms is expected to be even more pronounced since in the investigated high electron density regime the ratio of metastable and ground state argon atom densities is governed by the electron temperature, which peaks in the NL region. This neutral gas depletion is attributed to a high ionization rate in the NL zone and fast ion loss through ambipolar diffusion along the magnetic field lines. This is totally different from what is observed at pressures above 10 Pa where the degree of ionization is relatively low (<10(-3)) and neutral gas depletion is dominated by gas heating.
| Original language | English |
|---|---|
| Article number | 035208 |
| Number of pages | 7 |
| Journal | Journal of Physics D: Applied Physics |
| Volume | 41 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 7 Feb 2008 |
Keywords
- INDUCTIVELY-COUPLED PLASMA
- THOMSON SCATTERING
- LOOP DISCHARGE
- ATOMS
- PRESSURE
- TRANSPORT
- MODEL
- AR