Next generation secondary electron detector with energy analysis capability for SEM

Ashish Suri; Andrew Pratt; Steve Tear; Chris Walker; Mohamed M El Gomati

doi:10.1111/jmi.12867

Next generation secondary electron detector with energy analysis capability for SEM

Ashish Suri, Andrew Pratt, Steve Tear, Chris Walker, Mohamed M El Gomati

Research output: Contribution to journal › Article › peer-review

Abstract

We report the working of a novel detector design based on a Bessel Box (BB) electron energy analyser in a scanning electron microscope (SEM). We demonstrate the application of our detector for elemental identification through Auger electron detection in an SEM environment and its potential as a complementary technique to energy dispersive X‐ray (EDX) spectroscopy. We also demonstrate energy‐filtered secondary electron imaging of a copper‐on‐silicon sample using an electron pass energy of 12 eV.

Original language	English
Journal	Journal of Microscopy
Early online date	27 Jan 2020
DOIs	https://doi.org/10.1111/jmi.12867
Publication status	E-pub ahead of print - 27 Jan 2020

Bibliographical note

This is an author-produced version of the published paper. Uploaded in accordance with the publisher’s self-archiving policy. Further copying may not be permitted; contact the publisher for details.

Access to Document

10.1111/jmi.12867

SURI_et_al-2020-Journal_of_Microscopy
This is an author-produced version of the published paper. Uploaded in accordance with the publisher’s self-archiving policy. Further copying may not be permitted; contact the publisher for details.
Accepted author manuscript, 1.38 MB

Cite this

@article{4c9d5152655444fcbfb1c3576c7c7243,

title = "Next generation secondary electron detector with energy analysis capability for SEM",

abstract = "We report the working of a novel detector design based on a Bessel Box (BB) electron energy analyser in a scanning electron microscope (SEM). We demonstrate the application of our detector for elemental identification through Auger electron detection in an SEM environment and its potential as a complementary technique to energy dispersive X‐ray (EDX) spectroscopy. We also demonstrate energy‐filtered secondary electron imaging of a copper‐on‐silicon sample using an electron pass energy of 12 eV.",

author = "Ashish Suri and Andrew Pratt and Steve Tear and Chris Walker and {El Gomati}, {Mohamed M}",

note = "This is an author-produced version of the published paper. Uploaded in accordance with the publisher{\textquoteright}s self-archiving policy. Further copying may not be permitted; contact the publisher for details. ",

year = "2020",

month = jan,

day = "27",

doi = "10.1111/jmi.12867",

language = "English",

journal = "Journal of Microscopy",

issn = "0022-2720",

publisher = "Wiley-Blackwell",

}

TY - JOUR

T1 - Next generation secondary electron detector with energy analysis capability for SEM

AU - Suri, Ashish

AU - Pratt, Andrew

AU - Tear, Steve

AU - Walker, Chris

AU - El Gomati, Mohamed M

N1 - This is an author-produced version of the published paper. Uploaded in accordance with the publisher’s self-archiving policy. Further copying may not be permitted; contact the publisher for details.

PY - 2020/1/27

Y1 - 2020/1/27

N2 - We report the working of a novel detector design based on a Bessel Box (BB) electron energy analyser in a scanning electron microscope (SEM). We demonstrate the application of our detector for elemental identification through Auger electron detection in an SEM environment and its potential as a complementary technique to energy dispersive X‐ray (EDX) spectroscopy. We also demonstrate energy‐filtered secondary electron imaging of a copper‐on‐silicon sample using an electron pass energy of 12 eV.

AB - We report the working of a novel detector design based on a Bessel Box (BB) electron energy analyser in a scanning electron microscope (SEM). We demonstrate the application of our detector for elemental identification through Auger electron detection in an SEM environment and its potential as a complementary technique to energy dispersive X‐ray (EDX) spectroscopy. We also demonstrate energy‐filtered secondary electron imaging of a copper‐on‐silicon sample using an electron pass energy of 12 eV.

U2 - 10.1111/jmi.12867

DO - 10.1111/jmi.12867

M3 - Article

SN - 0022-2720

JO - Journal of Microscopy

JF - Journal of Microscopy

ER -