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Next generation secondary electron detector with energy analysis capability for SEM

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JournalJournal of Microscopy
DateAccepted/In press - 23 Jan 2020
DateE-pub ahead of print (current) - 27 Jan 2020
Early online date27/01/20
Original languageEnglish

Abstract

We report the working of a novel detector design based on a Bessel Box (BB) electron energy analyser in a scanning electron microscope (SEM). We demonstrate the application of our detector for elemental identification through Auger electron detection in an SEM environment and its potential as a complementary technique to energy dispersive X‐ray (EDX) spectroscopy. We also demonstrate energy‐filtered secondary electron imaging of a copper‐on‐silicon sample using an electron pass energy of 12 eV.

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