Nonlinear cancellation in weakly coupled MEMS resonators

Milind Pandit, Chun Zhao, Aref Mustafazade, Guillermo Sobreviela, Ashwin A. Seshia

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

For the first time, this paper demonstrates the cancellation of nonlinear response in weakly coupled resonators. It has been observed that by working in the region where the mechanical nonlinearity of the resonators and the electrical nonlinearity of the electrostatic coupling cancel, the output current amplitudes are increased by 4x while the trend of vibration amplitude variation upon stiffness perturbations is preserved as seen in the linear regime of the resonators.

Original languageEnglish
Title of host publication2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017 - Proceedings
PublisherIEEE
Pages16-19
Number of pages4
ISBN (Electronic)9781538629161
DOIs
Publication statusPublished - 27 Oct 2017
Event2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017 - Besancon, France
Duration: 9 Jul 201713 Jul 2017

Publication series

Name2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017 - Proceedings

Conference

Conference2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017
Country/TerritoryFrance
CityBesancon
Period9/07/1713/07/17

Bibliographical note

Funding Information:
This work is supported by funding from Innovate UK and Natural Environment Research Council.

Publisher Copyright:
© 2017 IEEE.

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