Numerical investigation of vacuum ultra-violet emission in Ar/O2 inductively coupled plasmas

Michel Osca Engelbrecht; Jonathan Jenderny; Henrik Hylla; Dominik Filla; Peter Awakowicz; Ihor Korolov; Christopher Paul Ridgers; Andrew Robert Gibson

doi:10.1088/1361-6595/ad7059

Numerical investigation of vacuum ultra-violet emission in Ar/O2 inductively coupled plasmas

Michel Osca Engelbrecht, Jonathan Jenderny, Henrik Hylla, Dominik Filla, Peter Awakowicz, Ihor Korolov, Christopher Paul Ridgers, Andrew Robert Gibson

Physics

Research output: Contribution to journal › Article › peer-review

Original language	English
Journal	Plasma Sources Science and Technology
DOIs	https://doi.org/10.1088/1361-6595/ad7059
Publication status	Published - 23 Sept 2024

Access to Document

10.1088/1361-6595/ad7059Licence: CC BY

Osca+Engelbrecht+et+al_2024_Plasma_Sources_Sci._Technol._10.1088_1361-6595_ad7059Accepted author manuscript, 2.78 MBLicence: CC BY

Numerical investigation of vacuum ultra-violet emission in Ar/O2 inductively coupled plasmas
Gibson, A. R. (Creator), Osca Engelbrecht, M. (Creator), Jenderny, J. (Creator), Hylla, H. (Creator), Filla, D. (Creator), Awakowicz, P. (Creator), Korolov, I. (Creator) & Ridgers, C. P. (Creator), Research Department Plasmas with Complex Interactions of Ruhr University Bochum, 12 Jul 2024
https://rdpcidat.rub.de/node/899
Dataset

Cite this

@article{8a188b3752e6428589f7f8c3c1dbcd8a,

title = "Numerical investigation of vacuum ultra-violet emission in Ar/O2 inductively coupled plasmas",

author = "{Osca Engelbrecht}, Michel and Jonathan Jenderny and Henrik Hylla and Dominik Filla and Peter Awakowicz and Ihor Korolov and Ridgers, {Christopher Paul} and Gibson, {Andrew Robert}",

year = "2024",

month = sep,

day = "23",

doi = "10.1088/1361-6595/ad7059",

language = "English",

journal = "Plasma Sources Science and Technology",

issn = "0963-0252",

publisher = "IOP Publishing",

}

TY - JOUR

T1 - Numerical investigation of vacuum ultra-violet emission in Ar/O2 inductively coupled plasmas

AU - Osca Engelbrecht, Michel

AU - Jenderny, Jonathan

AU - Hylla, Henrik

AU - Filla, Dominik

AU - Awakowicz, Peter

AU - Korolov, Ihor

AU - Ridgers, Christopher Paul

AU - Gibson, Andrew Robert

PY - 2024/9/23

Y1 - 2024/9/23

U2 - 10.1088/1361-6595/ad7059

DO - 10.1088/1361-6595/ad7059

M3 - Article

SN - 0963-0252

JO - Plasma Sources Science and Technology

JF - Plasma Sources Science and Technology

ER -

Numerical investigation of vacuum ultra-violet emission in Ar/O2 inductively coupled plasmas

Access to Document

Datasets

Numerical investigation of vacuum ultra-violet emission in Ar/O2 inductively coupled plasmas

Cite this