On Enhancing the Sensitivity of Resonant Thermometers Based on Parametric Modulation

TY - JOUR

T1 - On Enhancing the Sensitivity of Resonant Thermometers Based on Parametric Modulation

AU - Li, Chengxin

AU - Xi, Jingqian

AU - Wang, Yuan

AU - Li, Fangzheng

AU - Gao, Lu

AU - Liu, Huafeng

AU - Zhao, Chun

AU - Tu, Liang Cheng

N1 - Funding Information: Manuscript received March 8, 2021; revised April 21, 2021; accepted May 8, 2021. Date of publication May 24, 2021; date of current version July 30, 2021. This work was supported in part by the National Key Research and Development Program of China under Grant 2018YFB2002300, in part by the National Natural Science Foundation of China under Grant 11927812, and in part by the Fundamental Research Funds for the Central Universities, HUST, under Grant 2019kfyXJJS157. This article was presented at the 2021 IEEE MEMS [1]. Subject Editor A. Seshia. (Corresponding author: Chun Zhao.) Chengxin Li, Jingqian Xi, Yuan Wang, Fangzheng Li, Lu Gao, Huafeng Liu, and Chun Zhao are with the MOE Key Laboratory of Fundamental Physical Quantities Measurement and Hubei Key Laboratory of Gravitation and Quantum Physics, PGMF and School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China (e-mail: [email protected]). Publisher Copyright: © 1992-2012 IEEE.

PY - 2021/5/25

Y1 - 2021/5/25

N2 - In this paper, a new approach for enhancing the temperature sensitivity of a resonant MEMS thermometer, based on parametric modulation, is proposed. By periodically modulating the effective stiffness of a standard clamped-clamped beam (C-C beam), which is used as a proof-of-concept resonant MEMS thermometer, it is possible to create a virtual energy coupling between two fundamental modes of vibration. Through this energy transfer link, one particular mode (ideally high sensitivity) can be transferred to the vicinity of another mode (ideally low noise), thus creating an operating region where both increased sensitivity and low noise can be achieved. As a starting point, a sensitivity enhancement of up to 126% can be achieved in this particular study, while not deteriorating the readout noise floor. A noise floor of 19.7 μ K/Hz 1/2 has been achieved. Potentially, this approach could be extended to other structures, or be used to decrease sensitivity to temperature fluctuations as well. [2021-0050]

AB - In this paper, a new approach for enhancing the temperature sensitivity of a resonant MEMS thermometer, based on parametric modulation, is proposed. By periodically modulating the effective stiffness of a standard clamped-clamped beam (C-C beam), which is used as a proof-of-concept resonant MEMS thermometer, it is possible to create a virtual energy coupling between two fundamental modes of vibration. Through this energy transfer link, one particular mode (ideally high sensitivity) can be transferred to the vicinity of another mode (ideally low noise), thus creating an operating region where both increased sensitivity and low noise can be achieved. As a starting point, a sensitivity enhancement of up to 126% can be achieved in this particular study, while not deteriorating the readout noise floor. A noise floor of 19.7 μ K/Hz 1/2 has been achieved. Potentially, this approach could be extended to other structures, or be used to decrease sensitivity to temperature fluctuations as well. [2021-0050]

KW - MEMS thermometer

KW - parametric modulation

KW - resonant sensor

KW - sensitivity enhancement

UR - http://www.scopus.com/inward/record.url?scp=85107210907&partnerID=8YFLogxK

U2 - 10.1109/JMEMS.2021.3079442

DO - 10.1109/JMEMS.2021.3079442

M3 - Article

AN - SCOPUS:85107210907

SN - 1057-7157

VL - 30

SP - 539

EP - 549

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

IS - 4

M1 - 9439932

ER -