On the measurement of the backscattering coefficient for low energy electrons

M M El-Gomati; A M D Assa'd

On the measurement of the backscattering coefficient for low energy electrons

Electronic Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

An electron detector for the measurement of backscattering and secondary electron coefficients based on that of Reimer and Tollkamp has been devised and built. The detector is used in ultra high vacuum and allows one to use in-situ ion bombardment of the sample to remove surface contaminants before data collection. New experimental measurements of the backscattering and secondary electron coefficients in the energy range 0.5-6 keV are reported for C, Al, Si, Cu, Ge, Mo, Ag and Au. These are collected from both argon ion cleaned and as-inserted surfaces. The backscattering coefficients of the argon ion cleaned surfaces monotonically increases for elements of atomic number Z > 28 whilst it decreases for elements of Z < 28 for all energies used. This is in contrast to the as-inserted surfaces that show a more complex pattern below 1 keV incident energies.

Original language	English
Pages (from-to)	325-331
Number of pages	7
Journal	Microchimica Acta
Publication status	Published - 1998

Keywords

backscattering coefficients
electron scattering
LVSEM
electron detector
SECONDARY
SCATTERING
RANGE

Cite this

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title = "On the measurement of the backscattering coefficient for low energy electrons",

abstract = "An electron detector for the measurement of backscattering and secondary electron coefficients based on that of Reimer and Tollkamp has been devised and built. The detector is used in ultra high vacuum and allows one to use in-situ ion bombardment of the sample to remove surface contaminants before data collection. New experimental measurements of the backscattering and secondary electron coefficients in the energy range 0.5-6 keV are reported for C, Al, Si, Cu, Ge, Mo, Ag and Au. These are collected from both argon ion cleaned and as-inserted surfaces. The backscattering coefficients of the argon ion cleaned surfaces monotonically increases for elements of atomic number Z > 28 whilst it decreases for elements of Z < 28 for all energies used. This is in contrast to the as-inserted surfaces that show a more complex pattern below 1 keV incident energies.",

keywords = "backscattering coefficients, electron scattering, LVSEM, electron detector, SECONDARY, SCATTERING, RANGE",

author = "El-Gomati, {M M} and Assa'd, {A M D}",

year = "1998",

language = "English",

pages = "325--331",

journal = "Microchimica Acta",

issn = "0026-3672",

publisher = "Springer",

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TY - JOUR

T1 - On the measurement of the backscattering coefficient for low energy electrons

AU - El-Gomati, M M

AU - Assa'd, A M D

PY - 1998

Y1 - 1998

N2 - An electron detector for the measurement of backscattering and secondary electron coefficients based on that of Reimer and Tollkamp has been devised and built. The detector is used in ultra high vacuum and allows one to use in-situ ion bombardment of the sample to remove surface contaminants before data collection. New experimental measurements of the backscattering and secondary electron coefficients in the energy range 0.5-6 keV are reported for C, Al, Si, Cu, Ge, Mo, Ag and Au. These are collected from both argon ion cleaned and as-inserted surfaces. The backscattering coefficients of the argon ion cleaned surfaces monotonically increases for elements of atomic number Z > 28 whilst it decreases for elements of Z < 28 for all energies used. This is in contrast to the as-inserted surfaces that show a more complex pattern below 1 keV incident energies.

AB - An electron detector for the measurement of backscattering and secondary electron coefficients based on that of Reimer and Tollkamp has been devised and built. The detector is used in ultra high vacuum and allows one to use in-situ ion bombardment of the sample to remove surface contaminants before data collection. New experimental measurements of the backscattering and secondary electron coefficients in the energy range 0.5-6 keV are reported for C, Al, Si, Cu, Ge, Mo, Ag and Au. These are collected from both argon ion cleaned and as-inserted surfaces. The backscattering coefficients of the argon ion cleaned surfaces monotonically increases for elements of atomic number Z > 28 whilst it decreases for elements of Z < 28 for all energies used. This is in contrast to the as-inserted surfaces that show a more complex pattern below 1 keV incident energies.

KW - backscattering coefficients

KW - electron scattering

KW - LVSEM

KW - electron detector

KW - SECONDARY

KW - SCATTERING

KW - RANGE

M3 - Article

SN - 0026-3672

SP - 325

EP - 331

JO - Microchimica Acta

JF - Microchimica Acta

ER -