OPTICAL LITHOGRAPHY Lithography at EUV wavelengths

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@article{f5ee16061d2a4d818c4c232bf1d9769c,

title = "OPTICAL LITHOGRAPHY Lithography at EUV wavelengths",

author = "Greg Tallents and Erik Wagenaars and Geoff Pert",

year = "2010",

month = dec,

doi = "10.1038/nphoton.2010.277",

language = "English",

volume = "4",

pages = "809--811",

journal = "Nature photonics",

issn = "1749-4885",

publisher = "Nature Publishing Group",

number = "12",

}

TY - JOUR

T1 - OPTICAL LITHOGRAPHY Lithography at EUV wavelengths

AU - Tallents, Greg

AU - Wagenaars, Erik

AU - Pert, Geoff

PY - 2010/12

Y1 - 2010/12

UR - http://www.scopus.com/inward/record.url?scp=78649844564&partnerID=8YFLogxK

U2 - 10.1038/nphoton.2010.277

DO - 10.1038/nphoton.2010.277

M3 - Comment/debate

SN - 1749-4885

VL - 4

SP - 809

EP - 811

JO - Nature photonics

JF - Nature photonics

IS - 12

ER -