Particle-in-cell simulations of high frequency capacitively coupled plasmas including spatially localised inductive-like heating

Michel Osca Engelbrecht; Christopher Paul Ridgers; James Peter Dedrick; Rod Boswell

doi:10.1088/1361-6595/ad0fb1

Particle-in-cell simulations of high frequency capacitively coupled plasmas including spatially localised inductive-like heating

Michel Osca Engelbrecht^*, Christopher Paul Ridgers, James Peter Dedrick, Rod Boswell

^*Corresponding author for this work

Physics

Research output: Contribution to journal › Article › peer-review

Original language	English
Article number	125003
Number of pages	14
Journal	Plasma Sources Science and Technology
Volume	32
DOIs	https://doi.org/10.1088/1361-6595/ad0fb1
Publication status	Published - 7 Dec 2023

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10.1088/1361-6595/ad0fb1Licence: CC BY

Particle-in-cell simulations of high frequency capacitively coupled plasmas including spatially localised inductive-like heating
© 2023 The Author(s)
Final published version, 2.44 MBLicence: CC BY

Particle-in-cell simulations of high frequency capacitively coupled plasmas including spatially localised inductive-like heating
Osca Engelbrecht, M. (Contributor), Ridgers, C. P. (Contributor), Dedrick, J. P. (Creator) & Boswell, R. (Contributor), University of York, 4 Aug 2023
DOI: 10.15124/e818467f-880c-4e8b-90c5-f2b2f9be598a
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title = "Particle-in-cell simulations of high frequency capacitively coupled plasmas including spatially localised inductive-like heating",

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AU - Osca Engelbrecht, Michel

AU - Ridgers, Christopher Paul

AU - Dedrick, James Peter

AU - Boswell, Rod

PY - 2023/12/7

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JO - Plasma Sources Science and Technology

JF - Plasma Sources Science and Technology

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Particle-in-cell simulations of high frequency capacitively coupled plasmas including spatially localised inductive-like heating

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Particle-in-cell simulations of high frequency capacitively coupled plasmas including spatially localised inductive-like heating

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