Plasma ionization in low-pressure radio-frequency discharges: Part I: Optical measurements

Deborah O'Connell; Timo Gans; Albert Meige; Peter Awakowicz; Rod W. Boswell

doi:10.1109/TPS.2008.927348

Plasma ionization in low-pressure radio-frequency discharges: Part I: Optical measurements

Deborah O'Connell, Timo Gans, Albert Meige, Peter Awakowicz, Rod W. Boswell

Physics

Research output: Contribution to journal › Article › peer-review

Abstract

The electron dynamics in the low-pressure operation regime (< 5 Pa) of a neon capacitively coupled plasma is investigated using phase-resolved optical emission spectroscopy. Plasma ionization and sustainment mechanisms are governed by the expanding and contracting sheath and complex wave-particle interactions. Electrons are energized through the advancing and retreating electric field of the RF sheath. The associated interaction of energetic sheath electrons with thermal bulk plasma electrons drives a two-stream instability also dissipating power in the plasma.

Original language	English
Pages (from-to)	1382-1383
Number of pages	2
Journal	IEEE transactions on plasma science
Volume	36
Issue number	4
DOIs	https://doi.org/10.1109/TPS.2008.927348
Publication status	Published - Aug 2008

Keywords

capacitively coupled plasmas
electric field reversal
phase resolved optical emission spectroscopy
plasma diagnostics
plasma ionization
radio-frequency plasmas
wave-particle interaction
RF-DISCHARGES
ELECTRIC-FIELDS
SHEATH
SPACE

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10.1109/TPS.2008.927348

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title = "Plasma ionization in low-pressure radio-frequency discharges: Part I: Optical measurements",

abstract = "The electron dynamics in the low-pressure operation regime (< 5 Pa) of a neon capacitively coupled plasma is investigated using phase-resolved optical emission spectroscopy. Plasma ionization and sustainment mechanisms are governed by the expanding and contracting sheath and complex wave-particle interactions. Electrons are energized through the advancing and retreating electric field of the RF sheath. The associated interaction of energetic sheath electrons with thermal bulk plasma electrons drives a two-stream instability also dissipating power in the plasma.",

keywords = "capacitively coupled plasmas, electric field reversal, phase resolved optical emission spectroscopy, plasma diagnostics, plasma ionization, radio-frequency plasmas, wave-particle interaction, RF-DISCHARGES, ELECTRIC-FIELDS, SHEATH, SPACE",

author = "Deborah O'Connell and Timo Gans and Albert Meige and Peter Awakowicz and Boswell, {Rod W.}",

year = "2008",

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doi = "10.1109/TPS.2008.927348",

language = "English",

volume = "36",

pages = "1382--1383",

journal = "IEEE transactions on plasma science",

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TY - JOUR

T1 - Plasma ionization in low-pressure radio-frequency discharges

T2 - Part I: Optical measurements

AU - O'Connell, Deborah

AU - Gans, Timo

AU - Meige, Albert

AU - Awakowicz, Peter

AU - Boswell, Rod W.

PY - 2008/8

Y1 - 2008/8

N2 - The electron dynamics in the low-pressure operation regime (< 5 Pa) of a neon capacitively coupled plasma is investigated using phase-resolved optical emission spectroscopy. Plasma ionization and sustainment mechanisms are governed by the expanding and contracting sheath and complex wave-particle interactions. Electrons are energized through the advancing and retreating electric field of the RF sheath. The associated interaction of energetic sheath electrons with thermal bulk plasma electrons drives a two-stream instability also dissipating power in the plasma.

AB - The electron dynamics in the low-pressure operation regime (< 5 Pa) of a neon capacitively coupled plasma is investigated using phase-resolved optical emission spectroscopy. Plasma ionization and sustainment mechanisms are governed by the expanding and contracting sheath and complex wave-particle interactions. Electrons are energized through the advancing and retreating electric field of the RF sheath. The associated interaction of energetic sheath electrons with thermal bulk plasma electrons drives a two-stream instability also dissipating power in the plasma.

KW - capacitively coupled plasmas

KW - electric field reversal

KW - phase resolved optical emission spectroscopy

KW - plasma diagnostics

KW - plasma ionization

KW - radio-frequency plasmas

KW - wave-particle interaction

KW - RF-DISCHARGES

KW - ELECTRIC-FIELDS

KW - SHEATH

KW - SPACE

UR - http://www.scopus.com/inward/record.url?scp=50249141305&partnerID=8YFLogxK

U2 - 10.1109/TPS.2008.927348

DO - 10.1109/TPS.2008.927348

M3 - Article

SN - 0093-3813

VL - 36

SP - 1382

EP - 1383

JO - IEEE transactions on plasma science

JF - IEEE transactions on plasma science

IS - 4

ER -

Plasma ionization in low-pressure radio-frequency discharges: Part I: Optical measurements

Abstract

Keywords

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