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Plasma ionization in low-pressure radio-frequency discharges: Part I: Optical measurements

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JournalIEEE transactions on plasma science
DatePublished - Aug 2008
Issue number4
Volume36
Number of pages2
Pages (from-to)1382-1383
Original languageEnglish

Abstract

The electron dynamics in the low-pressure operation regime (< 5 Pa) of a neon capacitively coupled plasma is investigated using phase-resolved optical emission spectroscopy. Plasma ionization and sustainment mechanisms are governed by the expanding and contracting sheath and complex wave-particle interactions. Electrons are energized through the advancing and retreating electric field of the RF sheath. The associated interaction of energetic sheath electrons with thermal bulk plasma electrons drives a two-stream instability also dissipating power in the plasma.

    Research areas

  • capacitively coupled plasmas, electric field reversal, phase resolved optical emission spectroscopy, plasma diagnostics, plasma ionization, radio-frequency plasmas, wave-particle interaction, RF-DISCHARGES, ELECTRIC-FIELDS, SHEATH, SPACE

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