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Plasma ionization in low-pressure radio-frequency discharges: Part II: Particle-in-cell simulation

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JournalIEEE transactions on plasma science
DatePublished - Aug 2008
Issue number4
Volume36
Number of pages2
Pages (from-to)1384-1385
Original languageEnglish

Abstract

Plasma ionization in the low-pressure operation regime (< 5 Pa) of RF capacitively coupled plasmas (CCPs) is governed by a complex interplay of-various mechanisms, such as field reversal, sheath expansion, and wave-particle interactions. In a previous paper, it was shown that experimental observations in a hydrogen CCP operated at 13.56 MHz are qualitatively well described in a 1-D symmetrical particle-in-cell (PIC) simulation. In this paper, a spherical asymmetrical PIC simulation that is closer to the conditions of the highly asymmetrical experimental device is used to simulate a low-pressure neon CCP operated at 2 MHz. The results show a similar behavior, with pronounced ionization through field reversal, sheath expansion, and wave-particle interactions, and can be exploited for more accurate quantitative comparisons with experimental observations.

    Research areas

  • capacitively coupled plasma (CCP), field reversal, heating, particle-in-cell (PIC) simulation, RF, wave particle interaction

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