Plasma ionization through wave-particle interaction in a capacitively coupled radio-frequency discharge

D. O'Connell; T. Gans; D. Vender; U. Czarnetzki; R. Boswell

doi:10.1063/1.2717889

Plasma ionization through wave-particle interaction in a capacitively coupled radio-frequency discharge

D. O'Connell, T. Gans, D. Vender, U. Czarnetzki, R. Boswell

Physics

Research output: Contribution to journal › Article › peer-review

Abstract

Phase resolved optical emission spectroscopy, with high temporal resolution, shows that wave-particle interactions play a fundamental role in sustaining capacitively coupled rf plasmas. The measurements are in excellent agreement with a simple particle-in-cell simulation. Excitation and ionization mechanisms are dominated by beam-like electrons, energized through the advancing and retreating electric fields of the rf sheath. The associated large-amplitude electron waves, driven by a form of two-stream instability, result in power dissipation through electron trapping and phase mixing. (c) 2007 American Institute of Physics.

Original language	English
Article number	034505
Number of pages	4
Journal	Physics of Plasmas
Volume	14
Issue number	3
DOIs	https://doi.org/10.1063/1.2717889
Publication status	Published - Mar 2007

Keywords

RF-DISCHARGES
SIMULATION
SHEATH
SPACE

Access to Document

10.1063/1.2717889

Cite this

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title = "Plasma ionization through wave-particle interaction in a capacitively coupled radio-frequency discharge",

abstract = "Phase resolved optical emission spectroscopy, with high temporal resolution, shows that wave-particle interactions play a fundamental role in sustaining capacitively coupled rf plasmas. The measurements are in excellent agreement with a simple particle-in-cell simulation. Excitation and ionization mechanisms are dominated by beam-like electrons, energized through the advancing and retreating electric fields of the rf sheath. The associated large-amplitude electron waves, driven by a form of two-stream instability, result in power dissipation through electron trapping and phase mixing. (c) 2007 American Institute of Physics.",

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author = "D. O'Connell and T. Gans and D. Vender and U. Czarnetzki and R. Boswell",

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T1 - Plasma ionization through wave-particle interaction in a capacitively coupled radio-frequency discharge

AU - O'Connell, D.

AU - Gans, T.

AU - Vender, D.

AU - Czarnetzki, U.

AU - Boswell, R.

PY - 2007/3

Y1 - 2007/3

N2 - Phase resolved optical emission spectroscopy, with high temporal resolution, shows that wave-particle interactions play a fundamental role in sustaining capacitively coupled rf plasmas. The measurements are in excellent agreement with a simple particle-in-cell simulation. Excitation and ionization mechanisms are dominated by beam-like electrons, energized through the advancing and retreating electric fields of the rf sheath. The associated large-amplitude electron waves, driven by a form of two-stream instability, result in power dissipation through electron trapping and phase mixing. (c) 2007 American Institute of Physics.

AB - Phase resolved optical emission spectroscopy, with high temporal resolution, shows that wave-particle interactions play a fundamental role in sustaining capacitively coupled rf plasmas. The measurements are in excellent agreement with a simple particle-in-cell simulation. Excitation and ionization mechanisms are dominated by beam-like electrons, energized through the advancing and retreating electric fields of the rf sheath. The associated large-amplitude electron waves, driven by a form of two-stream instability, result in power dissipation through electron trapping and phase mixing. (c) 2007 American Institute of Physics.

KW - RF-DISCHARGES

KW - SIMULATION

KW - SHEATH

KW - SPACE

U2 - 10.1063/1.2717889

DO - 10.1063/1.2717889

M3 - Article

SN - 1070-664X

VL - 14

JO - Physics of Plasmas

JF - Physics of Plasmas

IS - 3

M1 - 034505

ER -