Reconstruction of images of surface height in scanning electron microscopy

C. G. H. Walker; M. M. El Gomati; V. Romanovsky

Reconstruction of images of surface height in scanning electron microscopy

C. G. H. Walker, M. M. El Gomati, V. Romanovsky

Electronic Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Existing scanning electron microscopes provide poor estimation of the height of surface features. Although topographic information can be provided by the use of several detectors, they provide an estimation of local surface angle, not the height of surface features. A new low energy scanning electron microscope equipped with a six fold detector was used to acquire images of the local surface angle of a sample. In addition, a technique which has not been previously applied to SEM data was used to integrate the images of the differential of the surface height. The algorithm is fast and resistant to noise which should allow almost real time reconstruction of images of surface height.

Original language	English
Title of host publication	Microscopy of Semiconducting Materials
Editors	AG Cullis, JL Hutchison
Place of Publication	BERLIN
Publisher	Springer
Pages	495-498
Number of pages	4
ISBN (Print)	3-540-31914-X
Publication status	Published - 2005
Event	14th Conference on Microscopy of Semiconducting Materials - Oxford Duration: 11 Apr 2005 → 14 Apr 2005

Conference

Conference	14th Conference on Microscopy of Semiconducting Materials
City	Oxford
Period	11/04/05 → 14/04/05

Keywords

SHAPE
SEM
TOPOGRAPHIES
DETECTOR

Cite this

@inproceedings{cbc66441983f400da5fd75895c97d56b,

title = "Reconstruction of images of surface height in scanning electron microscopy",

abstract = "Existing scanning electron microscopes provide poor estimation of the height of surface features. Although topographic information can be provided by the use of several detectors, they provide an estimation of local surface angle, not the height of surface features. A new low energy scanning electron microscope equipped with a six fold detector was used to acquire images of the local surface angle of a sample. In addition, a technique which has not been previously applied to SEM data was used to integrate the images of the differential of the surface height. The algorithm is fast and resistant to noise which should allow almost real time reconstruction of images of surface height.",

keywords = "SHAPE, SEM, TOPOGRAPHIES, DETECTOR",

author = "Walker, {C. G. H.} and {El Gomati}, {M. M.} and V. Romanovsky",

year = "2005",

language = "English",

isbn = "3-540-31914-X",

pages = "495--498",

editor = "AG Cullis and JL Hutchison",

booktitle = "Microscopy of Semiconducting Materials",

publisher = "Springer",

address = "Germany",

note = "14th Conference on Microscopy of Semiconducting Materials ; Conference date: 11-04-2005 Through 14-04-2005",

}

TY - GEN

T1 - Reconstruction of images of surface height in scanning electron microscopy

AU - Walker, C. G. H.

AU - El Gomati, M. M.

AU - Romanovsky, V.

PY - 2005

Y1 - 2005

N2 - Existing scanning electron microscopes provide poor estimation of the height of surface features. Although topographic information can be provided by the use of several detectors, they provide an estimation of local surface angle, not the height of surface features. A new low energy scanning electron microscope equipped with a six fold detector was used to acquire images of the local surface angle of a sample. In addition, a technique which has not been previously applied to SEM data was used to integrate the images of the differential of the surface height. The algorithm is fast and resistant to noise which should allow almost real time reconstruction of images of surface height.

AB - Existing scanning electron microscopes provide poor estimation of the height of surface features. Although topographic information can be provided by the use of several detectors, they provide an estimation of local surface angle, not the height of surface features. A new low energy scanning electron microscope equipped with a six fold detector was used to acquire images of the local surface angle of a sample. In addition, a technique which has not been previously applied to SEM data was used to integrate the images of the differential of the surface height. The algorithm is fast and resistant to noise which should allow almost real time reconstruction of images of surface height.

KW - SHAPE

KW - SEM

KW - TOPOGRAPHIES

KW - DETECTOR

M3 - Conference contribution

SN - 3-540-31914-X

SP - 495

EP - 498

BT - Microscopy of Semiconducting Materials

A2 - Cullis, AG

A2 - Hutchison, JL

PB - Springer

CY - BERLIN

T2 - 14th Conference on Microscopy of Semiconducting Materials

Y2 - 11 April 2005 through 14 April 2005

ER -