Reconstruction of images of surface height in scanning electron microscopy

C. G. H. Walker, M. M. El Gomati, V. Romanovsky

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Existing scanning electron microscopes provide poor estimation of the height of surface features. Although topographic information can be provided by the use of several detectors, they provide an estimation of local surface angle, not the height of surface features. A new low energy scanning electron microscope equipped with a six fold detector was used to acquire images of the local surface angle of a sample. In addition, a technique which has not been previously applied to SEM data was used to integrate the images of the differential of the surface height. The algorithm is fast and resistant to noise which should allow almost real time reconstruction of images of surface height.

Original languageEnglish
Title of host publicationMicroscopy of Semiconducting Materials
EditorsAG Cullis, JL Hutchison
Place of PublicationBERLIN
PublisherSpringer
Pages495-498
Number of pages4
ISBN (Print)3-540-31914-X
Publication statusPublished - 2005
Event14th Conference on Microscopy of Semiconducting Materials - Oxford
Duration: 11 Apr 200514 Apr 2005

Conference

Conference14th Conference on Microscopy of Semiconducting Materials
CityOxford
Period11/04/0514/04/05

Keywords

  • SHAPE
  • SEM
  • TOPOGRAPHIES
  • DETECTOR

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