Abstract
Existing scanning electron microscopes provide poor estimation of the height of surface features. Although topographic information can be provided by the use of several detectors, they provide an estimation of local surface angle, not the height of surface features. A new low energy scanning electron microscope equipped with a six fold detector was used to acquire images of the local surface angle of a sample. In addition, a technique which has not been previously applied to SEM data was used to integrate the images of the differential of the surface height. The algorithm is fast and resistant to noise which should allow almost real time reconstruction of images of surface height.
Original language | English |
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Title of host publication | Microscopy of Semiconducting Materials |
Editors | AG Cullis, JL Hutchison |
Place of Publication | BERLIN |
Publisher | Springer |
Pages | 495-498 |
Number of pages | 4 |
ISBN (Print) | 3-540-31914-X |
Publication status | Published - 2005 |
Event | 14th Conference on Microscopy of Semiconducting Materials - Oxford Duration: 11 Apr 2005 → 14 Apr 2005 |
Conference
Conference | 14th Conference on Microscopy of Semiconducting Materials |
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City | Oxford |
Period | 11/04/05 → 14/04/05 |
Keywords
- SHAPE
- SEM
- TOPOGRAPHIES
- DETECTOR