Reduction of amplitude ratio dependence on drive level in mode localized resonant MEMS sensors

Milind Pandit, Chun Zhao, Guillermo Sobreviela, Arif Mustafazade, Ashwin A. Seshia

Research output: Chapter in Book/Report/Conference proceedingConference contribution


For the first time, this paper highlights the dependence of amplitude ratio on the drive power in mode localized sensors. The simulation and experimental results show that the amplitude ratio measurements are least sensitive to drive power variations in the veering zone (where the two resonators are matched in stiffness and mass). This observation is a potential pathway to high resolution long term measurements in mode localized sensing.

Original languageEnglish
Title of host publicationIEEE SENSORS 2017 - Conference Proceedings
Number of pages3
ISBN (Electronic)9781509010127
Publication statusPublished - 21 Dec 2017
Event16th IEEE SENSORS Conference, ICSENS 2017 - Glasgow, United Kingdom
Duration: 30 Oct 20171 Nov 2017

Publication series

NameProceedings of IEEE Sensors
ISSN (Print)1930-0395
ISSN (Electronic)2168-9229


Conference16th IEEE SENSORS Conference, ICSENS 2017
Country/TerritoryUnited Kingdom

Bibliographical note

Funding Information:
ACKNOWLEDGMENT This work is supported by funding from Innovate UK and Natural Environment Research Council.

Publisher Copyright:
© 2017 IEEE.


  • MEMS
  • Mode localization
  • Resolution
  • Resonators
  • Veering

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