Reduction of amplitude ratio dependence on drive level in mode localized resonant MEMS sensors

Milind Pandit; Chun Zhao; Guillermo Sobreviela; Arif Mustafazade; Ashwin A. Seshia

doi:10.1109/ICSENS.2017.8233868

Reduction of amplitude ratio dependence on drive level in mode localized resonant MEMS sensors

Milind Pandit, Chun Zhao, Guillermo Sobreviela, Arif Mustafazade, Ashwin A. Seshia

Electronic Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

For the first time, this paper highlights the dependence of amplitude ratio on the drive power in mode localized sensors. The simulation and experimental results show that the amplitude ratio measurements are least sensitive to drive power variations in the veering zone (where the two resonators are matched in stiffness and mass). This observation is a potential pathway to high resolution long term measurements in mode localized sensing.

Original language	English
Title of host publication	IEEE SENSORS 2017 - Conference Proceedings
Publisher	IEEE
Pages	1-3
Number of pages	3
ISBN (Electronic)	9781509010127
DOIs	https://doi.org/10.1109/ICSENS.2017.8233868
Publication status	Published - 21 Dec 2017
Event	16th IEEE SENSORS Conference, ICSENS 2017 - Glasgow, United Kingdom Duration: 30 Oct 2017 → 1 Nov 2017

Publication series

Name	Proceedings of IEEE Sensors
Volume	2017-December
ISSN (Print)	1930-0395
ISSN (Electronic)	2168-9229

Conference

Conference	16th IEEE SENSORS Conference, ICSENS 2017
Country/Territory	United Kingdom
City	Glasgow
Period	30/10/17 → 1/11/17

Bibliographical note

Funding Information:
ACKNOWLEDGMENT This work is supported by funding from Innovate UK and Natural Environment Research Council.

Publisher Copyright:
© 2017 IEEE.

Keywords

MEMS
Mode localization
Resolution
Resonators
Veering

Access to Document

10.1109/ICSENS.2017.8233868

Cite this

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abstract = "For the first time, this paper highlights the dependence of amplitude ratio on the drive power in mode localized sensors. The simulation and experimental results show that the amplitude ratio measurements are least sensitive to drive power variations in the veering zone (where the two resonators are matched in stiffness and mass). This observation is a potential pathway to high resolution long term measurements in mode localized sensing.",

keywords = "MEMS, Mode localization, Resolution, Resonators, Veering",

author = "Milind Pandit and Chun Zhao and Guillermo Sobreviela and Arif Mustafazade and Seshia, {Ashwin A.}",

note = "Funding Information: ACKNOWLEDGMENT This work is supported by funding from Innovate UK and Natural Environment Research Council. Publisher Copyright: {\textcopyright} 2017 IEEE.; 16th IEEE SENSORS Conference, ICSENS 2017 ; Conference date: 30-10-2017 Through 01-11-2017",

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doi = "10.1109/ICSENS.2017.8233868",

language = "English",

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Pandit, M, Zhao, C, Sobreviela, G, Mustafazade, A & Seshia, AA 2017, Reduction of amplitude ratio dependence on drive level in mode localized resonant MEMS sensors. in IEEE SENSORS 2017 - Conference Proceedings., 8233868, Proceedings of IEEE Sensors, vol. 2017-December, IEEE, pp. 1-3, 16th IEEE SENSORS Conference, ICSENS 2017, Glasgow, United Kingdom, 30/10/17. https://doi.org/10.1109/ICSENS.2017.8233868

TY - GEN

T1 - Reduction of amplitude ratio dependence on drive level in mode localized resonant MEMS sensors

AU - Pandit, Milind

AU - Zhao, Chun

AU - Sobreviela, Guillermo

AU - Mustafazade, Arif

AU - Seshia, Ashwin A.

PY - 2017/12/21

Y1 - 2017/12/21

N2 - For the first time, this paper highlights the dependence of amplitude ratio on the drive power in mode localized sensors. The simulation and experimental results show that the amplitude ratio measurements are least sensitive to drive power variations in the veering zone (where the two resonators are matched in stiffness and mass). This observation is a potential pathway to high resolution long term measurements in mode localized sensing.

AB - For the first time, this paper highlights the dependence of amplitude ratio on the drive power in mode localized sensors. The simulation and experimental results show that the amplitude ratio measurements are least sensitive to drive power variations in the veering zone (where the two resonators are matched in stiffness and mass). This observation is a potential pathway to high resolution long term measurements in mode localized sensing.

KW - MEMS

KW - Mode localization

KW - Resolution

KW - Resonators

KW - Veering

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DO - 10.1109/ICSENS.2017.8233868

M3 - Conference contribution

AN - SCOPUS:85044333505

T3 - Proceedings of IEEE Sensors

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PB - IEEE

T2 - 16th IEEE SENSORS Conference, ICSENS 2017

Y2 - 30 October 2017 through 1 November 2017

ER -

Reduction of amplitude ratio dependence on drive level in mode localized resonant MEMS sensors

Abstract

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Bibliographical note

Keywords

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