Seismic Recording Using A Mode Localized MEMS Accelerometer

Milind Pandit; Chun Zhao; Guillermo Sobreviela; Xudong Zou; Ashwin A. Seshia

doi:10.1109/TRANSDUCERS.2019.8808572

Seismic Recording Using A Mode Localized MEMS Accelerometer

Milind Pandit, Chun Zhao, Guillermo Sobreviela, Xudong Zou, Ashwin A. Seshia

Electronic Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper reports the first demonstration of a mode localized resonant accelerometer (MLRXL) as a seismometer. The prototype sensor demonstrates a noise floor of 4.5μg/√Hz at a defined operating point corresponding to an amplitude ratio of 1.22. The device situated in Cambridge, UK recorded an earthquake of magnitude 3.8 with the epicenter at Grimsby, UK on the 9th of June, 2018. This measurement demonstrates the potential for mode localized MEMS accelerometers to be utilized for seismic applications with comparable performance to existing seismometers, with particular relevance to long-period measurements.

Original language	English
Title of host publication	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Publisher	IEEE
Pages	2150-2153
Number of pages	4
ISBN (Electronic)	9781728120072
DOIs	https://doi.org/10.1109/TRANSDUCERS.2019.8808572
Publication status	Published - 22 Aug 2019
Event	20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany Duration: 23 Jun 2019 → 27 Jun 2019

Publication series

Name	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference	20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Country/Territory	Germany
City	Berlin
Period	23/06/19 → 27/06/19

Bibliographical note

Funding Information:
This work is supported by funding from Innovate UK and Natural Environment Research Council.

Publisher Copyright:
© 2019 IEEE.

Keywords

Accelerometer
Bias Stability
Common mode rejection
Mode Localization
Noise
Sensitivity

Access to Document

10.1109/TRANSDUCERS.2019.8808572

Cite this

Pandit, M., Zhao, C., Sobreviela, G., Zou, X., & Seshia, A. A. (2019). Seismic Recording Using A Mode Localized MEMS Accelerometer. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 2150-2153). Article 8808572 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). IEEE. https://doi.org/10.1109/TRANSDUCERS.2019.8808572

Pandit, Milind ; Zhao, Chun ; Sobreviela, Guillermo et al. / Seismic Recording Using A Mode Localized MEMS Accelerometer. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. IEEE, 2019. pp. 2150-2153 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

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title = "Seismic Recording Using A Mode Localized MEMS Accelerometer",

abstract = "This paper reports the first demonstration of a mode localized resonant accelerometer (MLRXL) as a seismometer. The prototype sensor demonstrates a noise floor of 4.5μg/√Hz at a defined operating point corresponding to an amplitude ratio of 1.22. The device situated in Cambridge, UK recorded an earthquake of magnitude 3.8 with the epicenter at Grimsby, UK on the 9th of June, 2018. This measurement demonstrates the potential for mode localized MEMS accelerometers to be utilized for seismic applications with comparable performance to existing seismometers, with particular relevance to long-period measurements.",

keywords = "Accelerometer, Bias Stability, Common mode rejection, Mode Localization, Noise, Sensitivity",

author = "Milind Pandit and Chun Zhao and Guillermo Sobreviela and Xudong Zou and Seshia, {Ashwin A.}",

note = "Funding Information: This work is supported by funding from Innovate UK and Natural Environment Research Council. Publisher Copyright: {\textcopyright} 2019 IEEE.; 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII ; Conference date: 23-06-2019 Through 27-06-2019",

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doi = "10.1109/TRANSDUCERS.2019.8808572",

language = "English",

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Pandit, M, Zhao, C, Sobreviela, G, Zou, X & Seshia, AA 2019, Seismic Recording Using A Mode Localized MEMS Accelerometer. in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII., 8808572, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, IEEE, pp. 2150-2153, 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Berlin, Germany, 23/06/19. https://doi.org/10.1109/TRANSDUCERS.2019.8808572

Seismic Recording Using A Mode Localized MEMS Accelerometer. / Pandit, Milind; Zhao, Chun; Sobreviela, Guillermo et al.
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. IEEE, 2019. p. 2150-2153 8808572 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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T1 - Seismic Recording Using A Mode Localized MEMS Accelerometer

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AU - Zhao, Chun

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AU - Zou, Xudong

AU - Seshia, Ashwin A.

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N2 - This paper reports the first demonstration of a mode localized resonant accelerometer (MLRXL) as a seismometer. The prototype sensor demonstrates a noise floor of 4.5μg/√Hz at a defined operating point corresponding to an amplitude ratio of 1.22. The device situated in Cambridge, UK recorded an earthquake of magnitude 3.8 with the epicenter at Grimsby, UK on the 9th of June, 2018. This measurement demonstrates the potential for mode localized MEMS accelerometers to be utilized for seismic applications with comparable performance to existing seismometers, with particular relevance to long-period measurements.

AB - This paper reports the first demonstration of a mode localized resonant accelerometer (MLRXL) as a seismometer. The prototype sensor demonstrates a noise floor of 4.5μg/√Hz at a defined operating point corresponding to an amplitude ratio of 1.22. The device situated in Cambridge, UK recorded an earthquake of magnitude 3.8 with the epicenter at Grimsby, UK on the 9th of June, 2018. This measurement demonstrates the potential for mode localized MEMS accelerometers to be utilized for seismic applications with comparable performance to existing seismometers, with particular relevance to long-period measurements.

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Pandit M, Zhao C, Sobreviela G, Zou X, Seshia AA. Seismic Recording Using A Mode Localized MEMS Accelerometer. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. IEEE. 2019. p. 2150-2153. 8808572. (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). doi: 10.1109/TRANSDUCERS.2019.8808572

Seismic Recording Using A Mode Localized MEMS Accelerometer

Abstract

Publication series

Conference

Bibliographical note

Keywords

Access to Document

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