Silica and High-k Dielectric Thin Films in Microelectronics

G. Bersuker, Keith Patrick McKenna, Alexander L. Shluger

Research output: Chapter in Book/Report/Conference proceeding › Chapter

Original language	English
Title of host publication	Oxide Ultrathin Films: Science and Technology
DOIs	https://doi.org/10.1002/9783527640171.ch5
Publication status	Published - 10 Jan 2012

Access to Document

@inbook{97155491e03848a49ff69415eea82911,

title = "Silica and High-k Dielectric Thin Films in Microelectronics",

author = "G. Bersuker and McKenna, {Keith Patrick} and Shluger, {Alexander L.}",

year = "2012",

month = jan,

day = "10",

doi = "10.1002/9783527640171.ch5",

language = "English",

booktitle = "Oxide Ultrathin Films: Science and Technology",

}