Slope and amplitude asymmetry effects on low frequency capacitively coupled carbon tetrafluoride plasmas

Bastien Bruneau, I Korolov, T Lafleur, Timo Gans, Deborah O'Connell, Arthur Greb, A Derzsi, Z Donko, S Brandt, E Schüngel, J Schulze, Johnson E, J-P Booth

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